重离子辐照GaN.ppt
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1、重离子辐照GaN,Page 2,能量为500keV剂量为51014/cm2的Au+辐照GaN及退火的X射线衍射分析图,Page 3,能量为500keV剂量为51015/cm2的Au+辐照GaN及退火的X射线衍射分析图,Page 4,Au辐照GaN的RBS/C研究,Page 5,Transport of Ions in Matter,E , Z1,E2 , Z2,E1 , Z1,1. If E2Edisp,then Atomic Displacement . 2. If E1Edisp,E2Edisp,then Vacancy; If E2Edisp,Z1=Z2,then Replacement
2、 Collision,E1 is released as Phonons; If Z1Z2,then Z1 becomes a stopped Interstitial Atom. 4. If E1Edisp,E2Edisp,then Z1 becomes an interstitial Atom and E1+E2 is released as phonons .,Assume: Incident atom has atomic number Z1 , energy E . collision within the target with an atom of atomic number Z2 . After the collision, the incident ion has energy E1 and the struck atom has energy E2 .,Page 6,Transport of Ions in Matter,Displacements = Vacancies + Replacement Collisions Vacancies + Replacement = Interstitials + (Atoms which leave the target volume),入射粒子产生级联碰撞的示意图,
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- 离子 辐照 GaN
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