BT_Imaging公司设备介绍英文.pdf
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1、LIS-R1 Introduction 1BT Imaging Pty Ltd - Confidential Information - Not For Distribution Agenda R1 Overview R1 Features Customer Base R1 Application Examples 2BT Imaging Pty Ltd - Confidential Information - Not For Distribution LIS-R1 Overview 3BT Imaging Pty Ltd - Confidential Information - Not Fo
2、r Distribution Speeds up R&D, characterization and root cause analysis Flexible - PL, EL, RS, QSS-PC, lifetime image in a single tool Wafer, Cells and Blocks (optional) Use PL at any process stage Correlates with other techniques Highest Resolution Images 1 megapixel Fastest Data Acquisition 1 secon
3、d for cells Capabilities by Sample Type 4BT Imaging Pty Ltd - Confidential Information - Not For Distribution CapabilitiesSilicon Block Silicon Wafer Silicon Solar Cell Photoluminescence Image Average Injection level Dependant Lifetime (QSS-PC) Effective Minority Carrier Lifetime Image Electrolumine
4、scence Image Series Resistance Image PV supply chain - applications for luminescence imaging Si ingot/brick As-cut wafer Processed wafer Finished cellModule PL: Wafer manufacturingCell manufacturingModule manufacturing EL: BT Imaging Pty Ltd - Confidential Information - Not For Distribution - PCD 12
5、 3 4 5 6 s Centre: higher life time Side : diffusion of transition metals Top : segregated transition metals higher content of carbon Bottom : higher content of oxygen diffusion of transitions metals Background - Lifetime in Si ingots Courtesy of Dr Armin Mueller BT Imaging Pty Ltd - Confidential In
6、formation - Not For Distribution PL imaging of Si bricks PL Time:30s Res:165mm Excellent qualitative agreement with m-PCD scans for a large number of bricks m m-PCD Time:900s Res: 1mm BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL imaging of Si bricks SouthEastNorth West Edg
7、e Brick BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL imaging of Si bricks NorthEastSouth West 01800 0100 0100 Corner Brick BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL imaging of Si bricks Edge Wafer Corner Wafer Brick BT Imaging Pty Ltd - Confid
8、ential Information - Not For Distribution PL imaging of Si bricks Top Wafer Bottom Wafer Brick BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL imaging of Si bricks PL m-PCD BT Imaging Pty Ltd - Confidential Information - Not For Distribution As cut wafer High Magnification Op
9、tion BT imaging Confidential PL imaging - Upgraded metallurgical grade (UMG) brick Dark line represents doping transition region p-type n-type BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL Image of UMG Wafer 15Feb 2009BT Imaging Pty Ltd - Confidential Information - Not For
10、Distribution Slip lines in Mono Ingots No surface preparation 16Feb 2009BT Imaging Pty Ltd - Confidential Information - Not For Distribution Slip lines on Mono Wafers No wafer preparation 17Feb 2009BT Imaging Pty Ltd - Confidential Information - Not For Distribution New Method to Qualify Mono Slugs
11、PL imaging used to image the slug No toxic chemical preparation needed Faster 18 PL image taken on as cut slug Optical image taken after chemical preparation BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL imaging of Slip lines on Mono Wafers 19 As cut Mono WaferPolished Mono
12、 Wafer U-PCD (7 hours) PL (10 s) U-PCD (7 hours) PL (10 s) BT Imaging Pty Ltd - Confidential Information - Not For Distribution Mono Wafer PL Images 20BT Imaging Pty Ltd - Confidential Information - Not For Distribution Mono Wafer PL Images 21BT Imaging Pty Ltd - Confidential Information - Not For D
13、istribution PL Images show Large Variation in Todays Wafer Supply 22 All get processed into cells today with 1% efficiency differences And wafers all purchased at the same price BT Imaging Pty Ltd - Confidential Information - Not For Distribution PL imaging detects the limiting defects on as-cut waf
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