07-30163302-DC.pdf
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1、a Date: 6 March 2007 Origin: European Latest date for receipt of comments: 8 May 2007 Project no.: 2007/00564 Responsible committee: EPL/47 Semiconductors Interested committees: GEL/101, DS/1, EPL/501 Title: Draft BS EN 62047-6 Semiconductor devices - Micro-electromechanical devices Part 6: Axial fa
2、tigue testing methods of thin film materials Supersession information: If this document is published as a standard, the UK implementation of it will supersede NONE and partially supersede NONE . If you are aware of a current national standard which may be affected, please notify the secretary (conta
3、ct details below). WARNING: THIS IS A DRAFT AND MUST NOT BE REGARDED OR USED AS A BRITISH STANDARD. THIS DRAFT IS NOT CURRENT BEYOND 8 May 2007. This draft is issued to allow comments from interested parties; all comments will be given consideration prior to publication. No acknowledgement will norm
4、ally be sent. See overleaf for information on commenting. No copying is allowed, in any form, without prior written permission from BSI except as permitted under the Copyright, Designs and Patent Act 1988 or for circulation within a nominating organization for briefing purposes. Electronic circulati
5、on is limited to dissemination by e-mail within such an organization by committee members. Further copies of this draft may be purchased from BSI Customer Services, Tel: +44(0) 20 8996 9001 or email ordersbsi-. British, International and foreign standards are also available from BSI Customer Service
6、s. British Standards on CD or Online are available from British Standards Publishing Sales Limited. Tel: 01344 404409 or email bsonlinetechindex.co.uk. Information on the co-operating organizations represented on the committees referenced above may be obtained from the responsible committee secretar
7、y. Cross-references The British Standards which implement International or European publications referred to in this draft may be found via the British Standards Online Service on the BSI web site http:/www.bsi-. Direct tel: 020 8996 7009 Responsible Committee Secretary: Committee Service Centre (BS
8、I) E-mail: cscbsi- Draft for Public Comment Head Office 389 Chiswick High Road London W4 4AL Telephone: +44(0)20 8996 9000 Fax: +44(0)20 8996 7001 Form 36 Version 6.1 DPC: 07/30163302 DC Licensed Copy: London South Bank University, London South Bank University, Sat Mar 17 03:56:22 GMT+00:00 2007, Un
9、controlled Copy, (c) BSI b Introduction This draft standard is based on European discussions in which the UK took an active part. Your comments on this draft are welcome and will assist in the preparation of the consequent British Standard. If no comments are received to the contrary, then the UK wi
10、ll approve this draft and implement it as a British Standard. Comment is particularly welcome on national legislative or similar deviations that may be necessary. Even if this draft standard is not approved by the UK, if it receives the necessary support in Europe, the UK will be obliged to publish
11、the official English Language text unchanged as a British Standard and to withdraw any conflicting standard. UK Vote Please indicate whether you consider the UK should submit a negative (with reasons) or positive vote on this draft. Submission The guidance given below is intended to ensure that all
12、comments receive efficient and appropriate attention by the responsible BSI committee. Annotated drafts are not acceptable and will be rejected. All comments must be submitted, preferably electronically, to the Responsible Committee Secretary at the address given on the front cover. Comments should
13、be compatible with Version 6.0 or Version 97 of Microsoft Word for Windows, if possible; otherwise comments in ASCII text format are acceptable. Any comments not submitted electronically should still adhere to these format requirements. All comments submitted should be presented as given in the exam
14、ple below. Further information on submitting comments and how to obtain a blank electronic version of a comment form are available from the BSI web site at:http:/www.bsi- Template for comments and secretariat observations Date: xx/xx/200x Document: ISO/DIS xxxxx 1 2 (3) 4 5 (6) (7) MB Clause No./ Su
15、bclause No./ Annex (e.g. 3.1) Paragraph/ Figure/Table/ Note (e.g. Table 1) Type of com- ment Comment (justification for change) by the MB Proposed change by the MB Secretariat observations on each comment submitted 3.1 Definition 1 ed Definition is ambiguous and needs clarifying. Amend to read . so
16、that the mains connector to which no connection . 6.4 Paragraph 2 te The use of the UV photometer as an alternative cannot be supported as serious problems have been encountered in its use in the UK. Delete reference to UV photometer. Microsoft and MS-DOS are registered trademarks, and Windows is a
17、trademark of Microsoft Corporation. Licensed Copy: London South Bank University, London South Bank University, Sat Mar 17 03:56:22 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 47/1900/CD COMMITTEE DRAFT (CD) IEC/TC or SC: TC 47 Project number IEC 62047-6 Ed. 1.0 Title of TC/SC: Semiconductor devices D
18、ate of circulation 2007-03-02 Closing date for comments 2007-06-08 Also of interest to the following committees IEC TC 47E, 56, 91, 101 Supersedes document 47/1868/NP - 47/1891A/RVN Functions concerned: Safety EMC Environment Quality assurance Secretary: Ilsub Chung THIS DOCUMENT IS STILL UNDER STUD
19、Y AND SUBJECT TO CHANGE. IT SHOULD NOT BE USED FOR REFERENCE PURPOSES. RECIPIENTS OF THIS DOCUMENT ARE INVITED TO SUBMIT, WITH THEIR COMMENTS, NOTIFICATION OF ANY RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE AND TO PROVIDE SUPPORTING DOCUMENTATION. Title: IEC 62047-6, Ed. 1: Semiconductor devices
20、- Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (Titre) : Introductory note This CD was prepared based on the discussion result of TC47/WG4 London Meeting, 47/1891A/RVN. FORM CD (IEC) 2002-08-08 Copyright 2007 International Electrotechnical Commission
21、, IEC. All rights reserved. It is permitted to download this electronic file, to make a copy and to print out the content for the sole purpose of preparing National Committee positions. You may not copy or “mirror“ the file or printed version of the document, or any part of it, for any other purpose
22、 without permission in writing from IEC. Licensed Copy: London South Bank University, London South Bank University, Sat Mar 17 03:56:22 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 62047-6/1CD IEC 2 47/1900/CD CONTENTS 1 Scope 5 2 Normative references .5 3 Terms and definitions .5 4 Test piece 6 4.1 D
23、esign of test piece.6 4.2 Preparation of test piece7 4.3 Test piece thickness 7 4.4 Storage prior testing 7 5 Testing method and test apparatus .7 5.1 General.7 5.2 Method of gripping (mounting of test piece)7 5.3 Static loading test8 5.4 Method of loading8 5.5 Speed of testing 8 5.6 Environment con
24、trol.8 6 Endurances (Test termination)8 7 Test report .8 Annex A (informative) Significance of axial loading fatigue testing for thin films.10 Annex B (informative) Outline of round-robin tests performed in Japan11 Annex C (informative) Test piece .12 Annex D (informative) Displacement measurement.1
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