《BS-EN-100015-3-1994.pdf》由会员分享,可在线阅读,更多相关《BS-EN-100015-3-1994.pdf(10页珍藏版)》请在三一文库上搜索。
1、BRITISH STANDARD BS EN 100015-3:1994 Basic specification: Protection of electrostatic sensitive devices Part 3: Requirements for clean room areas The European Standard EN 100015-3:1993 has the status of a British Standard Licensed Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006
2、, Uncontrolled Copy, (c) BSI BS EN 100015-3:1994 This British Standard, having been prepared under the direction of the Electronic Components Standards Policy Committee, was published under the authority of the Standards Board and comes into effect on 15 April 1994 BSI 01-1999 The following BSI refe
3、rences relate to the work on this standard: Committee reference ECL/23 Draft for comment 93/203087 DC ISBN 0 580 22871 1 Cooperating organizations The European Committee for Electrotechnical Standardization (CENELEC), under whose supervision this European Standard was prepared, comprises the nationa
4、l committees of the following countries: The membership of the CECC is identical, with the exception of the national electrotechnical committees of Greece, Iceland and Luxembourg. AustriaItaly BelgiumLuxembourg DenmarkNetherlands FinlandNorway FrancePortugal GermanySpain GreeceSweden IcelandSwitzerl
5、and IrelandUnited Kingdom Amendments issued since publication Amd. No.DateComments Licensed Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS EN 100015-3:1994 BSI 01-1999i Contents Page Cooperating organizationsInside front cover National forewordii
6、 Foreword2 Text of EN 100015-33 National annex NA (informative) Committees responsibleInside back cover Licensed Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS EN 100015-3:1994 ii BSI 01-1999 National foreword This British Standard has been prepa
7、red under the direction of the Electronic Components Standards Policy Committee. It is identical with EN 100015-3:1993 Basic specification: Protection of electrostatic sensitive devices Part 3: Requirements for clean room areas, published by the CENELEC Electronic Components Committee (CECC). This s
8、tandard should be read in conjunction with BS EN 100015-1:1992 Basic specification: Protection of electrostatic sensitive devices Part 1: General requirements. Other particular requirement Parts are: BS EN 100015-2, Requirements for low humidity conditions. BS EN 100015-4, Requirements for high volt
9、age environments. A British Standard does not purport to include all the necessary provisions of a contract. Users of British Standards are responsible for their correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. Summary of pages This d
10、ocument comprises a front cover, an inside front cover, pages i and ii, the EN title page, pages 2 to 4, an inside back cover and a back cover. This standard has been updated (see copyright date) and may have had amendments incorporated. This will be indicated in the amendment table on the inside fr
11、ont cover. Licensed Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN 100015-3 December 1993 UDC Descriptors: Quality, electronic components, electrostatic sensitive devices English version Basic spe
12、cification: Protection of electrostatic sensitive devices Part 3: Requirements for clean room areas Spcification de base: Protection des produits sensibles aux dcharges lectrostatiques Partie 3: Exigences relatives aux salles blanches Grundspezifikation: Schutz von elektrostatisch gefhrdeten Bauelem
13、enten Teil 3: Anforderungen fr Reinrume This European Standard was approved by the CENELEC Electronic Components Committee (CECC) on 16 August 1993. CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the stat
14、us of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the General Secretariat of the CECC or to any CENELEC member. This European Standard exists in three official versions (English, Fren
15、ch, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the CECC General Secretariat has the same status as the official versions. CENELEC members are the national electrotechnical committees of Austria, Belg
16、ium, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and United Kingdom. The membership of the CECC is identical, with the exception of the national electrotechnical committees of Greece, Iceland and Luxembourg
17、. CECC CENELEC Electronic Components Committee Comit des Composants Electroniques du CENELEC CENELEC- Komitee fr Bauelemente der Elektronik General Secretariat: Gartenstr. 179, D-60596 Frankfurt/Main 1993 Copyright reserved to CENELEC members Ref. No. EN 100015-3:1993 E Licensed Copy: sheffieldun sh
18、effieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN 100015-3:1993 BSI 01-1999 2 Foreword The CENELEC Electronic Components Committee (CECC) is composed of those member countries of the European Committee for Electrotechnical Standardization (CENELEC) who wish to take par
19、t in a harmonized System for electronic components of assessed quality. The object of the System is to facilitate international trade by the harmonization of the specifications and quality assessment procedures for electronic components, and by the grant of an internationally recognized Mark, or Cer
20、tificate, of Conformity. The components produced under the System are thereby acceptable in all member countries without further testing. This European Standard was prepared by CECC WG ESD. The text of the draft based on document CECC(Secretariat)3301 was submitted to the formal vote; together with
21、the voting report, circulated as document CECC(Secretariat)3400, it was approved by CECC as EN 100015-3 on 16 August 1993. The following dates were fixed: Contents Page Foreword 2 Section 1. General 1General 3 1.1Scope 3 1.2 Definitions 3 Section 2. Design considerations to minimize the effects of E
22、SD Section 3. Labels, signs and marking 3.2Signs for ESD protected area (EPA)2 Section 4. ESD protected area (EPA) 4.3.1 General2 Section 5. Protective packaging, marking and identification for ESD 5.1Packaging materials2 Section 6. Purchase, receipt, storage and handling Section 7. Training Section
23、 8. Quality responsibilities Section 9. Periodic audit instructions latest date of announcement of the EN at national level(doa) 1993-12-23 latest date of publication of an identical national standard(dop) 1994-06-23 latest date of withdrawal of conflicting national standards(dow) 1995-06-23 License
24、d Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN 100015-3:1993 BSI 01-19993 Section 1. General 1 General 1.1 Scope This standard gives the additional requirements to standard EN 10015-1 for the protection of electrostatic discharge sensitive devi
25、ces from electrostatic discharges in clean room areas. The standard applies in clean room areas having classifications up to and including 100 (see Table 301) used for the manufacture, handling or repair of ESDS. For clean room area with classification greater than 100, the requirements of EN 10015-
26、1 apply. CAUTION: Although this standard does not include requirements for personal safety, attention is drawn to the need for all concerned to comply with the relevant local statutory requirements regarding the health and safety of all persons in all places of work including those covered by this s
27、tandard. (Attention is drawn to the fact that electrical potentials in excess of 50 V a.c. or 120 V d.c. may be dangerous to personnel). NOTEIn addition to the danger of electrostatic discharge damage from unwanted charge, electrostatic charge can also attract dust particles to the working surfaces
28、which may seriously affect yields in manufacturing processes by generating localised defects. To achieve the low particle count required, many materials used in clean room areas have the potential to create a high electrostatic charge, for example: synthetic overall clothing; workholders of quartz,
29、PTFE, polypropylene, PFA, and similar materials; worksurfaces. In addition, certain processes used in clean room areas can also generate a high electrostatic charge, for example: centrifuge drying processes; spray and brush cleaning; air transport systems; high energy processes. These working materi
30、als and processes combined with the low conductivity of the semiconductor materials used in device manufacture make it necessary to take extra precautions in clean rooms to ensure that product is not electrostatically damaged. 1.2 Definitions All definitions in clause 1.2 of Part 1 apply with the fo
31、llowing modifications. 1.2.4 electrostatic discharge sensitive device (ESDs) a discrete device, integrated circuit or assembly that may be damaged by electric fields or electrostatic discharge encountered in manufacture or in routine handling, testing and transits 1.2.301 clean room an area with a s
32、pecified maximum number and size or airborne particles per unit volume, the classification being in accordance with Table 301 Table 301a Section 2. Design considerations to minimize the effects of ESD All clauses in Section 2 of Part 1 apply. Section 3. Labels, signs and marking Clauses in Section 3
33、 of Part 1 apply except the following. 3.2 Signs for ESD protected area (EPA) Addition For clean rooms containing one or more EPAs, signs as shown in Figure 3 of EN 100015-1 shall be clearly visible to personnel before they enter the clean room. Section 4. ESD protected area (EPA) All clauses in Sec
34、tion 4 of Part 1 apply except for the following. Clause 4.1.301 New clause In instances where the requirements required for ESD protection cannot be met in conforming to the requirements for the clean room environment, all such deviations shall be recorded together with any additional equipment and/
35、or specified procedures required to give the necessary protection. 4.3.1 General Modification All material procured for use within an EPA shall have the following characteristics which shall be measured at (25 5) % relative humidity. Materials shall be acclimatized for a minimum of 24 hours. Materia
36、ls shall not be in conflict with the requirements for the relevant class of clean room. Maximum allowable airborne particles/FT3 equal to or greater than the particle size shown Class Particle size, micrometers (mm) 0,10,30,55 135310 1035030100 100N/A3001000 a Reference to American Federal standard
37、FED-209D. Licensed Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN 100015-3:1993 4 BSI 01-1999 NOTESuitable measuring methods for material parameters are given in EN 100015-1, annex A. 4.3.5 Garments Addition There shall be electrical continuity o
38、f between 7,5 105 and 1 1012 ohm between all parts of the garment. 4.3.7 Wrist straps Addition The total resistance from the hand or gloved hand to the remote end of the cord (including wrist band and cord) shall be between 9 105 ohm and 3,5 107 ohm. 4.3.8 Leg straps, toe and heel straps and electro
39、static dissipative footwear Replacement The resistance between a contact touched by one hand or gloved hand and a metal plate on which one foot is standing shall be less than 3,5 107 ohm, see annex A of EN 100015-1. 4.4 Ionization Addition NOTE 1Electrode erosion of ionizers may cause contamination
40、hence the frequency of needle cleaning should be closely monitored. NOTE 2The ionizer system should not disrupt the airflow prescribed for the cleanroom environment. 4.5 Humidity Addition 4.5.301 For clean room areas with less than 20 % relative humidity the additional requirements of EN 100015-2 sh
41、all apply. 4.6.13 Certification Replacement 4.6.13.1 Once the clean room incorporating an EPA is constructed, the local coordinator (see 8.2 of EN 10015-1) shall be satisfied that the requirements of 4.6.1 to 4.6.12 of EN 100015-1 are met and formal certification issued before use. 4.6.13.2 All inst
42、ances where the standard has been compromised in order to satisfy the working requirements of the clean room shall be recorded together with any extra equipment and/or specified procedures required to give the necessary protection. 4.11 EPA working practices 4.11.5 Modification Wrist straps connecte
43、d to an earth bonding point, or approved footwear with an approved floor shall be worn at all times when unprotected ESDS are being handled. Section 5. Protective packaging, marking and identification for ESD All clauses in Section 5 of Part 1 apply with the following addition. 5.1 Packaging materia
44、ls 5.1.4 The maintenance of antistatic, decay and shielding properties Replacement Packaging materials shall maintain their antistatic, decay time, resistivity and shielding properties during storage, transit, distribution, application, cleaning or use to the point of re-use. Addition 5.301 When the
45、 requirements of Section 5 of Part 1 cannot be met due to the clean room requirements, any deviation shall be recorded. 5.302 Should a conflict between ESD protection and clean room requirements occur, the materials used for ESD protection shall at least be antistatic and have a decay time from 1 00
46、0 V to 50 V of less than 2 seconds. Any deviation in requirements for ESD protection shall be recorded on the audit form. Section 6. Purchase, receipt, storage and handling All clauses in Section 6 of Part 1 apply. Section 7. Training All clauses in Section 7 of Part 1 apply. Section 8. Quality resp
47、onsibilities All clauses in Section 8 of Part 1 apply. Section 9. Periodic audit instructions All clauses in Section 9 of Part 1 apply with the following addition. 9.300 The audit shall ensure that the requirements of 4.6.1 to 4.6.12 of EN 100015-1 are met and any additional safe guards as specified
48、 in 4.6.13.2 and 5.301 remain in place until the original non-compliances have been corrected. Licensed Copy: sheffieldun sheffieldun, na, Thu Oct 26 01:48:16 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS EN 100015-3:1994 BSI 01-1999 National annex NA (informative) Committees responsible The prepara
49、tion of this British Standard was entrusted by the Electronic Components Standards Policy Committee (ECL/-) to Technical Committee ECL/23, upon which the following bodies were represented: Association of Franchised Distributors of Electronic Components British Electro-static Manufacturers Association British Electrostatic Control Association British Plastics Federation British Telecommunications plc EEA (the Association of Electronics, Telecommunications and Business Equipment Industries) Electronic Components Industry Federation GAMBICA (BEA
链接地址:https://www.31doc.com/p-3736942.html