BS-EN-ISO-14644-3-2005.pdf
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1、BRITISH STANDARD BS EN ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods The European Standard EN ISO 14644-3:2005 has the status of a British Standard ICS 13.040.35 ? Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled C
2、opy, (c) BSI BS EN ISO 14644-3:2005 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 20 December 2005 BSI 20 December 2005 ISBN 0 580 47150 0 National foreword This British Standard is the official English language version of EN ISO 14644-3:20
3、05. It is identical with ISO 14644-3:2005. The UK participation in its preparation was entrusted to Technical Committee LBI/30 Cleanroom technology, which has the responsibility to: aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the
4、 interpretation, or proposals for change, and keep UK interests informed; monitor related international and European developments and promulgate them in the UK. A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards w
5、hich implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publi
6、cation does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. Summary of pages This document comprises a front cover, an inside front cove
7、r, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 65 and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendments issued since publication Amd. No. DateComments Licensed Cop
8、y: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 14644-3 December 2005 ICS 13.040.35 English Version Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005) Sall
9、es propres et environnements matriss apparents - Partie 3: Mthodes dessai (ISO 14644-3:2005) Reinrume und zugehrige Reinraumbereiche - Teil 3: Prfverfahren (ISO 14644-3:2005) This European Standard was approved by CEN on 12 September 2005. CEN members are bound to comply with the CEN/CENELEC Interna
10、l Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the Central Secretariat or to any CEN member.
11、This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official versions. CEN members are
12、 the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kin
13、gdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: rue de Stassart, 36 B-1050 Brussels 2005 CENAll rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 14644-3:2005:
14、 E Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Foreword This document (EN ISO 14644-3:2005) has been prepared by Technical Committee ISO/TC 209 “Cleanrooms and associated controlled environments“ in collaboration with Technical Committee
15、 CEN/TC 243 “Cleanroom technology“, the secretariat of which is held by BSI. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by June 2006, and conflicting national standards shall be withdrawn at the
16、 latest by June 2006. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Irel
17、and, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 14644-3:2005 has been approved by CEN as EN ISO 14644-3:2005 without any modifications. EN ISO 14644-3:2005 L
18、icensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Reference number ISO 14644-3:2005(E) INTERNATIONAL STANDARD ISO 14644-3 First edition 2005-12-15 Cleanrooms and associated controlled environments Part 3: Test methods Salles propres et environn
19、ements matriss apparents Partie 3: Mthodes dessai EN ISO 14644-3:2005 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ii Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN ISO 14644-
20、3:2005 iii Contents Page Foreword iv Introduction v 1 Scope . 1 2 Normative references . 1 3 Terms and definitions. 2 3.1 General. 2 3.2 Airborne particle measurement. 2 3.3 Air filters and systems . 4 3.4 Airflow and other physical states . 5 3.5 Electrostatic measurement 5 3.6 Measuring apparatus
21、and measuring conditions 6 3.7 Occupancy states . 7 4 Test procedures 8 4.1 Cleanroom tests 8 4.2 Principle. 9 5 Test reports . 11 Annex A (informative) Choice of recommended tests of an installation and the sequence in which to carry them out. 12 Annex B (informative) Test methods 16 Annex C (infor
22、mative) Test apparatus 51 Bibliography . 64 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 01:59:56 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN ISO 14644-3:2005 iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO
23、member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, govern
24、mental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Di
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