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1、BRITISH STANDARD BS EN ISO 10692-1:2001 Gas cylinders Gas cylinder valve connections for use in the microelectronics industry Part 1: Outlet connections The European Standard EN ISO 10692-1:2001 has the status of a British Standard ICS 23.020.30 NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED
2、BY COPYRIGHT LAW Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS EN ISO 10692-1:2001 This British Standard, having been prepared under the direction of the Engineering Sector Policy and Strategy Committee, was published under the authorit
3、y of the Standards Policy and Strategy Committee on 12 September 2001 BSI 12 September 2001 ISBN 0 580 37522 6 National foreword This British Standard is the official English language version of EN ISO 10692-1:2001. It is identical with ISO 10692-1:2001. The UK participation in its preparation was e
4、ntrusted by Technical Committee PVE/3, Gas containers, to Subcommittee PVE/3/1, Valve fittings to gas cylinders, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references Attention is drawn to the fact that CE
5、N and CENLEC Standards normally annex which lists normative references to international publications. The British Standards which implement these international or European publications may be found in the BSI Standards Catalogue under the section entitled “International Standards Correspondence Inde
6、x”, or by using the “Find” facility of the BSI Standards Electronic Catalogue. A British Standard does not purport to include all the necessary provisions of a contract. Users of British Standards are responsible for their correct application. Compliance with a British Standard does not of itself co
7、nfer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promul
8、gate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to iv, pages 1 to 17, a blank page, the Annex ZA page and a back cover. The BSI copyright date displayed in this document
9、indicates when the document was last issued. Amendments issued since publication Amd. No. DateComments Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 10692-1 August 2001 ICS 23.020.30
10、 English version Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1: Outlet connections (ISO 10692-1:2001) Bouteilles gaz - Raccords pour robinets de bouteilles gaz pour lindustrie de la microlectronique - Partie 1: Raccords de sortie (ISO 10692-1:2001)
11、Ortsbewegliche Gasflaschen - Ventilanschlsse fr die Anwendung in der Mikroelektonik - Teil 1: Seitenanschlsse (ISO 10692-1:2001) This European Standard was approved by CEN on 16 June 2001. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for gi
12、ving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the Management Centre or to any CEN member. This European Standard exists in three official versi
13、ons (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Cze
14、ch Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: rue de St
15、assart, 36 B-1050 Brussels 2001 CENAll rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 10692-1:2001 E Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI I NESO 01-296:1002( 1E) 2
16、Foreword The text of the International Standard ISO 10692-1:2001 has been prepared by Technical Committee ISO/TC 58 “Gas cylinders“ in collaboration with Technical Committee CEN/TC 23 “Transportable gas cylinders“, the secretariat of which is held by BSI. This European Standard shall be given the st
17、atus of a national standard, either by publication of an identical text or by endorsement, at the latest by February 2002, and conflicting national standards shall be withdrawn at the latest by February 2002. According to the CEN/CENELEC Internal Regulations, the national standards organizations of
18、the following countries are bound to implement this European Standard: Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of th
19、e International Standard ISO 10692-1:2001 was approved by CEN as a European Standard without any modification. NOTE: Normative references to International Standards are listed in annex ZA (normative). EN ISO 106921:2001 4 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006
20、, Uncontrolled Copy, (c) BSI Reference number ISO 10692-1:2001(E) OSI 1002 INTERNATIONAL STANDARD ISO 10692-1 First edition 2001-08-15 Gas cylinders Gas cylinder valve connections for use in the micro-electronics industry Part 1: Outlet connections Bouteilles gaz Raccords pour robinets de bouteilles
21、 gaz pour lindustrie de la microlectronique Partie 1: Raccords de sortie Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ii Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 10692-
22、1:2001(E) iii ContentsPage Foreword.iv 1Scope 1 2Normative references1 3General requirements1 4General design.2 5Dimensions.2 6630 and 640 series connections.2 7710 and 720 series connections.6 8Components common to both series10 9Thread profile.12 10Allocation of outlet to single gases listed in an
23、nex A .12 11Allocation of other gases and of gas mixtures to outlets .13 Annex A (normative) Mandatory outlet allocations for selected single gases.14 Annex B (informative) Examples showing how to use the information given in clauses 10 and 1116 Bibliography17 4 egaP EN ISO 106921:2001 PD 62762:001
24、1002-70 ISB i Annex ZA (normative) Normative references to international publications with their relevant European publicationsInside back cover Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 10692-1:2001(E) iv Foreword ISO (the Interna
25、tional Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has be
26、en established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical stan
27、dardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at le
28、ast 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this part of ISO 10692 may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. InternationalStandardISO 10692-1waspreparedbyT
29、echnicalCommitteeISO/TC 58,Gascylinders, Subcommittee SC 2, Cylinder fittings. ISO 10692 consists of the following parts, under the general title Gas cylinders Gas cylinder valve connections for use in the micro-electronics industry: Part 1: Outlet connections Part 2: Specification and type testing
30、for valve to cylinder connections Annex A forms a normative part of this part of ISO 10692. Annex B is for information only. 4 egaP EN ISO 106921:2001 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI INTENRATIONAL TSANDADRISO -296011:(1002E)
31、1 Gas cylinders Gas cylinder valve connections for use in the micro-electronics industry Part 1: Outlet connections 1Scope This part of ISO 10692 applies to the outlet connections of gas cylinder valves for gases and gas mixtures and concerns special requirements where the highest levels of cleanlin
32、ess and freedom from particles are demanded for the manufacture of microelectronic components or similar applications. 2Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this part of ISO 10692. For dated referenc
33、es, subsequent amendments to, or revisions of, any of these publications do not apply. However, parties to agreements based on this part of ISO 10692 are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references,
34、 the latest edition of the normative document referred to applies. Members of ISO and IEC maintain registers of currently valid International Standards. ISO 68-2, ISO general-purpose screw threads Basic profile Part 2: Inch screw threads. ISO 6506-1, Metallic materials Brinell hardness test Part 1:
35、Test method. ISO 10156, Gases and gas mixtures Determination of fire potential and oxidizing ability for the selection of cylinder valve outlets. ISO 10297, Gas cylinders Refillable gas cylinder valves Specification and type testing. ISO 10298, Determination of toxicity of a gas or gas mixture. ISO
36、11114-1, Transportable gas cylinders Compatibility of cylinder and valve materials with gas contents Part 1: Metallic materials. 3General requirements 3.1Materials The following materials and specifications are recommended: ?For valve and nipple: AISI 316L, microfinished, hardness at least 130 HBW i
37、n accordance with ISO 6506-1; ?For the union nut: AISI 304, threading silver plated. Other materials and values may be chosen if they give at least equivalent performance in terms of yield stress and resistance to corrosion (see ISO 11114-1). Page 5 1002:129601 OSI NE 4 egaP EN ISO 106921:2001 Licen
38、sed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 10692-1:2001(E) 2 3.2Operation For these connections the outboard leak rate shall not exceed a value of 1?10?7mbar?l?s?1at 137 bar helium when the connection is tightened to 50 N?m. When this ou
39、tboard leak rate is obtained, an inboard helium leak rate shall be no greater than 1?10?9mbar?l?s?1. The gasket shall be an unused recessed flat, uncoated gasket of Ni 200, fully annealed with the requirements of 8.1. Its hardness shall be HBW 2,5/62,5: 80 to 100 HBW (in accordance with ISO 6506-1)
40、with a surface finish ?0,8 m turned in the sealing area. Gaskets of other materials, e.g. polymers, may be used if they do not compromise the leak integrity of the connection and are compatible with the duty. These gaskets shall be used at a torque appropriate for the material. NOTEConditions of use
41、 may cause significant differences in both the inboard and outboard leak rates, e.g. nickel gaskets should be used only once. 3.3Marking The valves shall be marked with the requirements listed in ISO 10297, as far as appropriate. In addition to all the required valve marking the letters “nnn“, where
42、 nnn is the outlet number, shall be marked. 4General design Figure 1 shows the connection in the assembled state (view from the top). The nipple tip has two notches to facilitate the removal of the gasket. A pair of keys on the nipple and of the corresponding key ways on the valve prevent rotation o
43、f the parts during assembly. The keys shall be opposite to each other and vertically oriented. The antirotational device shall always be in place. The nut shall not engage on the outlet thread until the antirotational pins fitted to the plug are engaged in the slots on the valve outlet. An alternati
44、ve way to design the antirotational device of the nipple is described in 8.3. The union nut shall have two venting holes opposite to each other. 5Dimensions Dimensions for the outlet connections are given in Figures 2 to 9. Only dimensions explicitly given there are mandatory. Others shall be chosen
45、 as appropriate. All dimensions are in millimetres. The thread definition is given in clause 9. The diameters dA, dB, dMand dNare not dimensioned in the figures because they assume different values for each connection. They are chosen in such a way that combinations other than the intended ones are
46、impossible. The diameters dAand dBon the valve outlet as well as dMand dNon the nipple shall be concentric within 0,05 mm full indicator movement because these are critical dimensions for safety. 6630 and 640 series connections Details of the valve outlet are given in Figure 2. Figure 3 gives detail
47、s of the nipple. The values of the diameters dA, dB, dMand dNfor the 630 and 640 series connections are given in Table 1. Figure 4 shows the union nut. 6 egaP EN ISO 106921:2001 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 10692-1:200
48、1(E) 3 Key 1Valve outlet 2Nipple 3Union nut 4Gasket and circlips Figure 1 Assembly drawing of the connections (view from the top) Table 1 Index diameters of the 630 and 640 series connections dAdBdMdN No. min.max.min.max.min.max.min.max. 63216,4916,5820,2220,3216,3116,4020,0420,14 63416,8416,9419,86
49、19,9616,6616,7619,6919,79 63617,217,319,5119,6117,0217,1219,3319,43 63817,5517,6519,1519,2517,3717,4818,9719,08 64017,9118,0018,8018,8917,7317,8318,6218,71 64218,2618,3618,2618,3618,0818,1818,0818,18 7 egaP EN ISO 106921:2001 Licensed Copy: sheffieldun sheffieldun, na, Sat Nov 18 16:10:00 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 10692-1:2001(E) 4 l1 11,1 min. d110,62 u d1u 10,71 l2 8,38 0,25 0,13 ? ? d28,13 max. l38,38 0 0,25 ? ? d323,37 u d3u 23,49 l49,14 0,25 0 ? ? d4 1,030 external a l
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