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1、| | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | BRITISH STANDARD BS EN ISO 11146:2000 The
2、European Standard EN ISO 11146:1999 has the status of a British Standard ICS 31.260 NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAW Laser and laser-related equipment Test methods for laser beam parameters Beam width, divergence angle and beam Licensed Copy: sheffieldun sheffie
3、ldun, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI This British Standard, having been prepared under the direction of the Consumer Products and Services Sector Committee, was published under the authority of the Standards Committee and comes into effect on 15 November 2000 BSI
4、11-2000 ISBN 0 580 36489 5 BS EN ISO 11146:2000 Amendments issued since publication Amd. No.DateComments National foreword This British Standard is the official English language version of EN ISO 11146:1999. It is identical with ISO 11146:1999. The UK participation in its preparation was entrusted t
5、o Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor
6、related international and European developments and promulgate them in the UK. A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references Attention is drawn to the fact that CEN and CENELEC Standards normally include an annex which lists norma
7、tive references to international publications with their corresponding European publications. The British Standards which implement these international or European publications may be found in the BSI Standards Catalogue under the section entitled International Standards Correspondence Index, or by
8、using the Find facility of the BSI Standards Electronic Catalogue. A British Standard does not purport to include all the necessary provisions of a contract. Users of British Standards are responsible for their correct application. Compliance with a British Standard does not of itself confer immunit
9、y from legal obligations. Summary of pages This document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 26, the annex ZA page and a back cover. The BSI copyright notice displayed throughout
10、this document indicates when the document was last issued. Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 11146 June 1999 ICS 31.260 English version Lasers and laser-related equipment
11、 - Test methods for laser beam parameters - Beam widths, divergence angle and beam propagation factor (ISO 11146:1999) Lasers et quipements associs aux lasers - Mthodes dessai des paramtres des faisceaux laser - Largeurs du faisceau, angle de divergence et facteur de propagation du faisceau (ISO 111
12、46:1999) Laser und Laseranlagen - Prfverfahren fr Laserstrahlparameter - Strahlabmessungen, Divergenzwinkel und Strahlpropagationsfaktor (ISO 11146:1999) This European Standard was approved by CEN on 19 May 1999. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipula
13、te the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the Central Secretariat or to any CEN member. This European Standard exis
14、ts in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official versions. CEN members are the national standards bod
15、ies of Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG
16、Central Secretariat: rue de Stassart, 36 B-1050 Brussels 1999 CENAll rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 11146:1999 E Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BS
17、I Foreword The text of the International Standard ISO 11146:1999 has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and laser related equipment“, the secretariat of which is held by DIN. This European Stan
18、dard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by December 1999, and conflicting national standards shall be withdrawn at the latest by December 1999. According to the CEN/CENELEC Internal Regulations, the national s
19、tandards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and the United Kingdom. Endorse
20、ment notice The text of the International Standard ISO 11146:1999 was approved by CEN as a European Standard without any modification. NOTE: Normative references to International Standards are listed in annex ZA (normative). EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12
21、:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI A Reference number ISO 11146:1999(E) INTERNATIONAL STANDARD ISO 11146 First edition 1999-06-01 Lasers and laser-related equipment Test methods for laser beam parameters Beam widths, divergence angle and beam propagation factor Lasers et quipements as
22、socis aux lasers Mthodes dessai des paramtres des faisceaux laser Largeurs du faisceau, angle de divergence et facteur de propagation du faisceau EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ii Contents 1 Scope1 2 Normat
23、ive references1 3 Terms and definitions .1 4 Coordinate systems.3 5 Test principles4 6 Measurement arrangement and test equipment.5 7 Beam widths and beam diameter measurement 6 8 Divergence angle measurement.7 9 Combined determination of laser beam propagation parameters8 10 Determination of beam p
24、ropagation factor and times-diffraction-limit factor 9 11 Test report11 Annex A (normative) Alternative methods for beam width measurements14 Annex B (normative) Equations for non-circular beams.21 Annex C (informative) Derivation of equations24 EN ISO 11146:1999 Licensed Copy: sheffieldun sheffield
25、un, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI iii Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO t
26、echnical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates clos
27、ely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated
28、to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. International Standard ISO 11146 was prepared by Technical Committee ISO/TC 172, Optics and optical instruments, Subcommittee SC 9, Electro-optical system
29、s. Annexes A and B form a normative part of this International Standard. Annex C is for information only. EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI iv Introduction Any radially symmetric laser beam requires three para
30、meters for characterization: a) location of the beam waist z0; b) waist diameter ds0; and c) the far-field divergence angle s for the beam under test. With these three values, one can predict the beam diameter at any plane along the propagation axis. To a first approximation (for divergence angles l
31、ess than 0,8 rad), the beam propagates as ( ) () dzd z s?s?s 2 020 2 2 =+z Q?(1) The beam propagates according to equation (1) provided the second moments of the power (energy) density distribution function are used for the definition of beam widths and divergences. The propagation is described by a
32、 beam propagation factor K or a times-diffraction-limit factor M2 which can be derived from the above basic data. The relationship between K and M2, respectively, the actual waist diameter d0 and the divergence angle , is: K M n d d = = 1 4 141 2 0 00 l l s?s?s?s ppQQ (2) where K is the beam propaga
33、tion factor; M2is the times-diffraction-limit factor; 0is the wavelength in vacuum ; is the wavelength in medium with index of refraction n, is the divergence angle, d0is the waist diameter, n is the index of refraction. NOTE 1 The accuracy of measurement of beam propagation factors is expected to b
34、e in the region of 10 %. It is not consistent with divergence angles (full angle according to ISO 11145) above 0,8 rad. The product n d K M = s?s ll 0 0 2 0 44 Q pp (3) describes the propagation of laser beams and is invariant throughout the propagation of the beam as long as aberration-free and non
35、-aperturing optical systems are used. For non-radially symmetric beams, the values of seven parameters are required for characterization: locations of the beam waists z0x and z0y waist widths d0x and d0y; EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+00:00 200
36、6, Uncontrolled Copy, (c) BSI v far-field divergence angles x and y; and azimuth angle between the x-axis of the beam axes system and the x-axis of the laboratory system. The x- axis of the beam axes system coincides with the principal axis of the laser beam closest (within 45) to the arbitrary x co
37、ordinate. In analogy to equation (3), the propagation of non-radially symmetric beams, which are however still characterizable using two principal axes orthogonal to each other, can be described independently for the x- and y-axes using Kx and Ky as beam propagation factors, or Mx 2 and My 2 as time
38、s-diffraction-limit factors, respectively. NOTE 2 Beams that suffer from general astigmatism (twisted beams) require three additional parameters for their characterization. The propagation in the x-z plane is not necessarily independent of the propagation characteristics in the y-z plane and not nec
39、essarily along the propagation path will a generally astigmatic beam exhibit a circular power density distribution. The measurement of generally astigmatic beams is outside the scope of this International Standard. In this International Standard, the second moments of the power (energy) density dist
40、ribution function are used for the determination of beam widths. However, there may be problems experienced in the direct measurement of this property in the beams from some laser sources. In this case, other indirect methods of measurement of second moment may be used as long as comparable results
41、are achievable. In annex A, three alternative methods for beam width measurement and their correlation with the method used in this International Standard are described. These methods are: Variable aperture method Moving knife-edge method Moving slit method The problem of the dependence of the measu
42、ring result on the truncation limits of the integration has been investigated and evaluated by an international round robin carried out in 1997. The results of this round robin testing were taken into consideration in this document. EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun N
43、ov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+00:00 2006, Uncontrolled Copy, (c) BSI 1 Lasers and laser-related equipment Test methods for laser beam parameters Beam widths, divergence angle and beam pr
44、opagation factor 1 Scope This International Standard specifies methods for measuring beam widths (diameter), divergence angles and beam propagation factors of laser beams. These methods may not apply to highly diffractive beams such as those produced by unstable resonators or passing through hard-ed
45、ged apertures. 2 Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this International Standard. For dated references, subsequent amendments to, or revisions of, any of these publications do not apply. However, pa
46、rties to agreements based on this International Standard are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references, the latest edition of the normative document referred to applies. Members of ISO and IEC mai
47、ntain registers of currently valid International Standards. ISO 11145:1994, Optics and optical instruments Lasers and laser-related equipment Vocabulary and symbols. IEC 61040:1990, Power and energy measuring detectors Instruments and equipment for laser radiation. 3 Terms and definitions For the pu
48、rposes of this International Standard, the terms and definitions given in ISO 11145 and IEC 61040, and the following apply: 3.1 energy density H(x,y) that part of the beam energy which impinges on the area A at the location x, y divided by the area A 3.2 power density E(x,y) that part of the beam po
49、wer which impinges on the area A at the location x, y divided by the area A 3.3 beam waist locations z0, z0x, z0y positions where beam widths reach their minimum values along the axis of propagation See Figure 1. NOTE The locations are expressed as the distances to the beam waists (inside or outside the resonator) from a reference plane defined by the manufacturer e.g. the front of the laser enclosure. EN ISO 11146:1999 Licensed Copy: sheffieldun sheffieldun, na, Sun Nov 19 12:48:40 GMT+
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