BS-ISO-18114-2003.pdf
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1、BRITISH STANDARD BS ISO 18114:2003 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials ICS 71.040.40 ? Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI
2、 BS ISO 18114:2003 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 7 August 2003 BSI 7 August 2003 ISBN 0 580 42438 3 National foreword This British Standard reproduces verbatim ISO 18114:2003 and implements it as the UK national standard. Th
3、e UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement int
4、ernational publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to inc
5、lude all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enqu
6、iries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the ISO title page, pages ii to v, a blank p
7、age, pages 1 to 4, an inside back cover and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendments issued since publication Amd. No. DateComments Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontr
8、olled Copy, (c) BSI Reference number ISO 18114:2003(E) OSI 3002 INTERNATIONAL STANDARD ISO 18114 First edition 2003-04-01 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials Analyse chimique des surfaces Spect
9、romtrie de masse des ions secondaires Dtermination des facteurs de sensibilit relative laide de matriaux de rfrence ions implants BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) DPlcsid Fremia ihTs PDF fil
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15、41181 O3002(E) I SO 3002 All irhgts seredevr iii Contents Page Forewordiv Introduction.v 1 Scope1 2 Normative references1 3 Terms and definitions.1 4 Symbols and abbreviated terms1 5 Principle .2 6 Apparatus.2 7 Ion-implanted reference materials.2 8 Procedure.2 9 Test report3 Bibliography4 BS ISO 18
16、114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) iv I SO 3002 All irhgts seredevr Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member
17、bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental
18、and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directive
19、s, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies c
20、asting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 18114 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, S
21、ubcommittee SC 6, Secondary ion mass spectrometry. BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:41181 O3002(E) I SO 3002 All irhgts seredevr v Introduction Ion-implanted materials are commonly used in secondary-ion ma
22、ss spectrometry for the calibration of instruments. This international Standard was prepared to provide a uniform method for determining the relative sensitivity factor of an element in a specified matrix from an ion-implanted reference material, and to show how the concentration of the element in a
23、 different sample of the same matrix material can be determined. BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncontrolled Copy, (c) BSI blank BS ISO 18114:2003 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:26:12 GMT+00:00 2006, Uncont
24、rolled Copy, (c) BSI INTENRATIONAL TSANDADR IS:41181 O3002(E) I SO 3002 All irhgts seredevr 1 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sensitivity factors from ion-implanted reference materials 1 Scope This International Standard specifies a method of deter
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