BS-ISO-17973-2002.pdf
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1、BRITISH STANDARD BS ISO 17973:2002 Surface chemical analysis Medium-resolution Auger electron spectrometers Calibration of energy scales for elemental analysis ICS 71.040.40 ? Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS ISO 17973:2002
2、 This British Standard was published under the authority of the Standards Policy and Strategy Committee on 12 February 2003 BSI 12 February 2003 ISBN 0 580 41248 2 National foreword This British Standard reproduces verbatim ISO 17973:2002 and implements it as the UK national standard. The UK partici
3、pation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international p
4、ublications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the
5、 necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the
6、 interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the ISO title page, pages ii to v, a blank page, pages 1
7、 to 11 and a back cover. The BSI copyright date displayed in this document indicates when the document was last issued. Amendments issued since publication Amd. No. DateComments Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Reference numbe
8、r ISO 17973:2002(E) INTERNATIONAL STANDARD ISO 17973 First edition 2002-10-15 Surface chemical analysis Medium- resolution Auger electron spectrometers Calibration of energy scales for elemental analysis Analyse chimique des surfaces Spectromtres dlectrons Auger rsolution moyenne talonnage des chell
9、es dnergie pour lanalyse lmentaire BS ISO 17973:2002 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI BS ISO 17973:2002 ii Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:37971 O20
10、02(E) I SO 2002 All irthgs ersedevr iii Contents Page Foreword iv Introduction. v 1 Scope 1 2 Normative reference 1 3 Terms and definitions. 1 4 Symbols and abbreviated terms 1 5 Outline of method 2 6 Energy scale calibration procedures 3 6.1 Obtaining reference samples. 3 6.2 Mounting samples. 3 6.
11、3 Cleaning samples 3 6.4 Choosing spectrometer settings for energy calibration. 5 6.5 Operating the instrument . 5 6.6 Measurement of reference peaks 6 6.7 Determining the measured kinetic energies of the reference peaks. 8 6.8 Determination of the correction of the instrument kinetic energy scale.
12、8 6.9 Next calibration . 9 Bibliography 11 BS ISO 17973:2002 iii Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:37971 O2002(E) vi I SO 2002 All irthgs ersedevr Foreword ISO (the International Organization for Standardization) is a worldw
13、ide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on th
14、at committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in
15、accordance with the rules given in the ISO/IEC Directives, Part 3. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard r
16、equires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this International Standard may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 17973 was pr
17、epared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 7, X-ray photoelectron spectroscopy. BS ISO 17973:2002 iv Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI IS:37971 O2002(E) I SO 2002 All irthgs ersedevr v
18、Introduction Auger electron spectroscopy (AES) is used extensively for the surface analysis of materials. Elements in the sample (with the exception of hydrogen and helium) are identified from comparisons of the peak energies and peak shapes, with tabulations of peak energies and data in handbooks o
19、f spectra for the different elements. To identify the peaks, calibration of the energy scale with an uncertainty of 3 eV is generally adequate, and this International Standard is only intended for work at that level of accuracy (for greater accuracy, see ISO 17974 1). The method for calibrating kine
20、tic energy scales specified in this International Standard uses metallic samples of pure copper (Cu) and either aluminium (Al) or gold (Au). It does not include tests for defects in the instrument, since few defects are significant at the level of accuracy concerned. Traditionally, kinetic energies
21、of Auger electrons have been referenced to the vacuum level, and this reference is still used by many analysts. However, the vacuum level is ill-defined and can vary from instrument to instrument over a range of 0,5 eV. Although use of the vacuum level reference procedure will generally not cause am
22、biguity in elemental identification, it may cause uncertainty in measurements at high resolution relating to chemical states. Because of this, instruments designed for both Auger electron spectroscopy and X-ray photoelectron spectroscopy reference the kinetic energies to the Fermi level, giving valu
23、es typically 4,5 eV higher than those referenced to the vacuum level. For the purposes of this International Standard, the user is free to choose the reference appropriate to his or her work. BS ISO 17973:2002 v Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontro
24、lled Copy, (c) BSI Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:11:58 GMT+00:00 2006, Uncontrolled Copy, (c) BSI INTENRATIONAL TSANDADR IS:37971 O2002(E) I SO 2002 All irthgs ersedevr 1 Surface chemical analysis Medium-resolution Auger electron spectrometers Calibration of energy scales
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