BS-ISO-14237-2000.pdf
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1、| | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | BRITISH STANDARD BS ISO 14237:2000 ICS 71.
2、040.40 NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAW Surface chemical analysis Secondary-ion mass spectrometry Determination of boron atomic concentration in silicon using uniformly doped materials Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:12:21 GMT+00:00 200
3、6, Uncontrolled Copy, (c) BSI This British Standard, having been prepared under the direction of the Sector Committee for Materials and Chemicals, was published under the authority of the Standards Committee and comes into effect on 15 April 2000 BSI 04-2000 ISBN 0 580 34674 9 BS ISO 14237:2000 Amen
4、dments issued since publication Amd. No.DateComments National foreword This British Standard reproduces verbatim ISO 14237:2000 and implements it as the UK national standard. The UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis, which has the
5、 responsibility to: aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the U
6、K. A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international publications referred to in this document may be found in the BSI Standards Catalogue under the section entitled International St
7、andards Correspondence Index, or by using the Find facility of the BSI Standards Electronic Catalogue. A British Standard does not purport to include all the necessary provisions of a contract. Users of British Standards are responsible for their correct application. Compliance with a British Standa
8、rd does not of itself confer immunity from legal obligations. Summary of pages This document comprises a front cover, an inside front cover, the ISO title page, pages ii to v, a blank page, pages 1 to 22, an inside back cover and a back cover. The BSI copyright notice displayed in this document indi
9、cates when the document was last issued. Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Reference number ISO 14237:2000(E) INTERNATIONAL STANDARD ISO 14237 First edition 2000-02-01 Surface chemical analysis Secondary- ion mass spectrometry
10、Determination of boron atomic concentration in silicon using uniformly doped materials Analyse chimique des surfaces Mthode par spectromtrie de masse des ions secondaires Dosage des atomes de bore dans le silicium laide de matriaux dops uniformment Licensed Copy: sheffieldun sheffieldun, na, Mon Nov
11、 27 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 14237:2000(E) ii? Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 14237:2000(E) ?iii Contents?Page Foreword.iv Introduction.v 1?Scope 1 2?Normative reference1 3?Principle1 4?Ref
12、erence materials.1 5?Apparatus.2 6?Specimen3 7?Procedure.3 8?Expression of results 6 9?Test report8 Annex A (informative) Determination of carrier density in silicon wafers 9 Annex B (informative) Boron isotope ratio measured by SIMS12 Annex C (normative) Procedures for evaluation of apparatus perfo
13、rmance15 Annex D (normative) Procedures for the depth profiling of NIST SRM 213717 Annex E (informative) Statistical report on interlaboratory test programme20 Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 14237:2000(E) iv? Foreword IS
14、O (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical co
15、mmittee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electro
16、technical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires app
17、roval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this International Standard may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. International Standard ISO
18、14237 was prepared by Technical Committee ISO/TC 201,Surface chemical analysis, Subcommittee SC 6,Secondary ion mass spectrometry. Annexes C and D form a normative part of this International Standard. Annexes A, B and E are for information only. Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27
19、 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI ISO 14237:2000(E) ?v Introduction This International Standard was prepared for the determination by secondary-ion mass spectrometry (SIMS) of boron atomic concentrations in uniformly doped silicon wafers. SIMS needs reference materials to perform
20、quantitative analyses. Certified reference materials are only available for limited matrix-impurity combinations, and they are costly. SIMS inevitably consumes these reference materials at every measurement. Thus, secondary reference materials which can be prepared by each laboratory and calibrated
21、using a certified reference material are useful for daily analyses. In this International Standard, a standard procedure is described for quantitative boron analysis in single-crystalline silicon using secondary reference materials calibrated by a certified reference material implanted with boron. L
22、icensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI Licensed Copy: sheffieldun sheffieldun, na, Mon Nov 27 04:12:21 GMT+00:00 2006, Uncontrolled Copy, (c) BSI INTERNATIONAL STANDARD?ISO 14237:2000(E) ?1 Surface chemical analysis Secondary-ion mas
23、s spectrometry Determination of boron atomic concentration in silicon using uniformly doped materials 1?Scope This International Standard specifies a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon using uniformly doped materi
24、als calibrated by a certified reference material implanted with boron. This method is applicable to uniformly doped boron in the concentration range from 1 ? 1016atoms/cm3to 1 ? 1020atoms/cm3. 2?Normative reference The following normative document contains provisions which, through reference in this
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