CGA-G-14-2003.pdf
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1、 CGA G-142003 (EIGA DOC 92/03) CODE OF PRACTICE FOR NITROGEN TRIFLUORIDE FIRST EDITION COMPRESSED GAS ASSOCIATION, INC. 4221 Walney Road, 5th Floor Chantilly, VA 20151 Phone: 703-788-2700 Fax: 703-961-1831 E-mail: PAGE ii COMPRESSED GAS ASSOCIATION, INC. CGA G-142003 PREFACE As a part of a program
2、of harmonization of industry standards, the European Industrial Gases Association (EIGA) with the participation of the Compressed Gas Association (CGA) and the Japanese Industrial Gases Association (JIGA) has produced CGA G-142003, Code of Practice for Nitrogen Trifluoride. This standard is intended
3、 as a joint EIGA/CGA/JIGA international harmonized standard for the worldwide use and application by all members of EIGA, CGA and JIGA. The CGA edition has the same technical content as the EIGA edition, however, there are editorial changes primarily in formatting and spelling and references to regi
4、onal regulatory requirements. CGA G-142003 COMPRESSED GAS ASSOCIATION, INC. PAGE iii PLEASE NOTE: The information contained in this document was obtained from sources believed to be reliable and is based on technical information and experience currently available from members of the Compressed Gas A
5、ssociation, Inc. and others. However, the Association or its members, jointly or severally, make no guarantee of the results and assume no liability or responsibility in connection with the information or suggestions herein contained. Moreover, it should not be assumed that every acceptable commodit
6、y grade, test or safety procedure or method, precaution, equipment or device is contained within, or that abnormal or unusual circumstances may not warrant or suggest further requirements or additional procedure. This document is subject to periodic review, and users are cautioned to obtain the late
7、st edition. The Associa- tion invites comments and suggestions for consideration. In connection with such review, any such comments or suggestions will be fully reviewed by the Association after giving the party, upon request, a reasonable op- portunity to be heard. Proposed changes may be submitted
8、 via the Internet at our web site, . This document should not be confused with Federal, state, provincial, or municipal specifications or regulations; insurance requirements; or national safety codes. While the Association recommends reference to or use of this document by government agencies and ot
9、hers, this document is purely voluntary and not binding. A listing of all publications, audiovisual programs, safety and technical bulletins, and safety posters is available via the Internet at our website at . For more information contact CGA at Phone: 703-788-2700, ext. 799. E-mail: Docket 01-54
10、Specialty Gases Committee NOTEAppendices A and B (Informative) are for information only. FIRST EDITION: 2003 2003 BY THE COMPRESSED GAS ASSOCIATION, INC. ALL RIGHTS RESERVED. 4221 WALNEY ROAD, 5TH FLOOR, CHANTILLY, VA 20151 Printed in U.S.A. PAGE iv COMPRESSED GAS ASSOCIATION, INC. CGA G-142003 Cont
11、ents Page 1 Introduction.1 2 Scope and purpose1 3 Definitions.1 4 Gas properties2 4.1 Gas identification.2 4.2 Physical properties3 4.3 Chemical properties.4 4.4 Toxicology .4 4.5 Environmental issues 4 5 Gas major hazards.4 5.1 Introduction to fire and explosion hazards.4 5.2 Factors influencing co
12、mbustionnitrogen trifluoride considerations 5 5.3 Factors influencing combustionmaterial considerations 6 5.4 Other factors influencing combustionenergy source8 6 Gas handling equipmentgeneral considerations.9 6.1 Design principles.9 6.2 Materials of construction9 6.3 Gas velocities9 6.4 Cleaning an
13、d passivation after installation and maintenance10 6.5 Valves10 6.6 Filters.10 6.7 Operating procedures and personnel10 6.8 Maintenance procedures.10 6.9 Separation from flammable gases.11 6.10 Heat dissipation.11 6.11 Compression .11 7 Gas cylinder filling 11 7.1 Filling facility considerations11 7
14、.2 Gas containers and associated equipment .12 7.3 Cylinder filling equipment 13 8 Gas supply to point-of-use .14 8.1 Facility considerations.14 8.2 Gas supply manifolds14 8.3 Operating procedures and personnel15 9 Gas abatement systems.15 9.1 Basic principles of abatement15 9.2 Abatementsemiconduct
15、or process tool exhaust system15 9.3 Abatement at a cylinder filling facility.16 10 Emergency response .16 11 References.16 12 Additional references17 Tables Table 1Physical properties of nitrogen trifluoride 3 Table 2Table of conversion factors .3 -,-,- CGA G-142003 COMPRESSED GAS ASSOCIATION, INC.
16、 PAGE v Figures Figure 1Vapor pressure curve.3 Figure 2Triangle of fire 5 Appendices Appendix AEIGA Material Safety Data Sheet (Informative) 18 Appendix BAudit checklist (Informative)22 -,-,- -,-,- This page is intentionally blank. CGA G-142003 COMPRESSED GAS ASSOCIATION, INC. PAGE 1 1 Introduction
17、Nitrogen trifluoride is an oxidizing compressed gas that has gained acceptance in a number of applications as a fluorinating agent. It is this property that makes it valuable as a nonreactive source of fluorine for etching and cleaning applications. The active fluorine is released only if sufficient
18、 energy is applied. Once initiated, the reac- tion is self propagating and presents a hazard for a material that is incompatible with fluorine (e.g., flammable gas, metals). Nitrogen trifluoride can be safely handled if equipment is properly designed and appropriate handling precau- tions are taken.
19、 This document has been prepared by the European Industrial Gas Association with the assistance of the Com- pressed Gas Association a combustible material in contact with the oxidizer; and a source of ignition energy. For each of these elements, several factors influencing the combustion must be con
20、sidered. They are given in 5.2, 5.3, and 5.4. -,-,- CGA G-142003 COMPRESSED GAS ASSOCIATION, INC. PAGE 5 Figure 2Triangle of fire 5.2 Factors influencing combustionnitrogen trifluoride considerations The following factors influence the combustion of materials: 5.2.1 Nitrogen trifluoride pressure Nit
21、rogen trifluoride is relatively inert at atmospheric pressure and ambient temperature. The autoignition tem- perature of some combustible materials in nitrogen trifluoride can decrease with increasing nitrogen trifluoride pressure, making the material more susceptible to ignition. Likewise, operatin
22、g at high pressures increases the chance for adiabatic compression (see 5.4.3) in the system, which would create high temperature from the heat of compression (see 5.2.2). 5.2.2 Nitrogen trifluoride decomposition temperature The primary concern with nitrogen trifluoride and higher temperatures (300
23、C and may depend upon catalyz- ing effect of certain materials) is the dissociation of nitrogen trifluoride into reactive fluorine species that will react with most materials. These reactive species can lead to uncontrolled reactions with polymers or certain metals, liberating heat and causing furth
24、er dissociation of nitrogen trifluoride. Therefore, precautions must be taken to prevent conditions or mechanisms that could lead to inadvertent heating of nitrogen trifluoride. At higher temperatures, nitrogen trifluoride loses its inherent chemical stability. The autoignition temperature of a mate
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