ISO-15632-2002.pdf
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1、INTERNATIONAL STANDARD ISO 15632 First edition 2002-12-01 Reference number ISO 15632:2002(E) ISO 2002 Microbeam analysis Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors Analyse par microfaisceaux Spcifications instrumentales pour spectromtres rayons
2、X dispersion dnergie avec dtecteurs semiconducteurs Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/22/2007 08:23:12 MDTNo reproduction or networking permitted without license from IHS -
3、,-,- ISO 15632:2002(E) ii ISO 2002 All rights reserved PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobes licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the comp
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6、 Central Secretariat at the address given below. ISO 2002 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either
7、ISO at the address below or ISOs member body in the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.ch Web www.iso.ch Printed in Switzerland Copyright International Organization for Standardization Prov
8、ided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/22/2007 08:23:12 MDTNo reproduction or networking permitted without license from IHS -,-,- ISO 15632:2002(E) ISO 2002 All rights reserved iii Foreword ISO (the International Organization for Standard
9、ization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to
10、be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Stand
11、ards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies ca
12、sting a vote. Attention is drawn to the possibility that some of the elements of this International Standard may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. International Standard ISO 15632 was prepared by Technical Committee ISO/
13、TC 202, Microbeam analysis. Annexes A and B form a normative part of this International Standard. Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for Resale, 04/22/2007 08:23:12 MDTNo reproduction or n
14、etworking permitted without license from IHS -,-,- ISO 15632:2002(E) iv ISO 2002 All rights reserved Introduction Recent progress in energy dispersive X-ray spectrometry (EDS) by means of improved manufacturing technologies for detector crystals, new materials for the detectors X-ray entrance window
15、 and the application of advanced pulse processing techniques have increased the general performance of spectrometers and extended their application to low energies (below ). In the past, a spectrometer was commonly specified by its energy resolution at high energies defined as the full width at half
16、 maximum (FWHM) of the Mn-K line. To specify the properties in the low energy range, values for the FWHM of C-K, F-K or the zero peak are given by the manufacturers. Some manufacturers also specify a peak to background ratio, which may be defined as a peak to shelf ratio in a spectrum from an Fe55 s
17、ource or as peak to valley ratio in a boron spectrum. Definitions of the same quantity may be different. The sensitivity of the spectrometer at low energies related to that at high energies depends strongly on the construction of the detector crystal and the X-ray entrance window used. Although high
18、 sensitivity at low energies is important for the application of the spectrometer in the analysis of light element compounds, normally the manufacturers do not specify an energy dependence for spectrometer efficiency. This International Standard was developed in response to a worldwide demand for mi
19、nimum specifications of EDS spectrometers. EDS is one of the most applied methods used to analyse the chemical composition of solids and thin films. This International Standard should permit comparison of the performance of different spectrometer designs on the basis of a uniform specification and h
20、elp to find the optimum spectrometer for a particular task. In addition, this International Standard contributes to the equalization of performances in separate test laboratories. In accordance with ISO/IEC 17025, such laboratories have to periodically check the calibration status of their equipment
21、 according to a defined procedure. This International Standard may serve as a guide for similar procedures in all relevant test laboratories. 1 keV Copyright International Organization for Standardization Provided by IHS under license with ISO Licensee=NASA Technical Standards 1/9972545001 Not for R
22、esale, 04/22/2007 08:23:12 MDTNo reproduction or networking permitted without license from IHS -,-,- INTERNATIONAL STANDARDISO 15632:2002(E) ISO 2002 All rights reserved 1 Microbeam analysis Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors 1Scope This
23、 International Standard defines the most important quantities that characterize an energy dispersive X-ray spectrometer (EDS) consisting of a semiconductor detector, a pre-amplifier and a signal processing unit as the essential parts. This International Standard is only applicable to spectrometers w
24、ith semiconductor detectors operating on the principle of solid state ionization. This International Standard specifies minimum requirements for such spectrometers attached to an electron probe microanalyser (EPMA) or a scanning electron microscope (SEM). Realization of the analysis is outside the s
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