JIS-B-9920-2002-ENG.pdf
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1、J IS JAPANESE I NDUSTRIAL STANDARD Translated and Published by Japanese Standards Association (JACA/ JSA) Classif kat ion of air cleanliness for cleanrooms ICs 13.040.35 Reference number : JIS B 9920 : 2002 (E) PROTECTED BY COPYRIGHT 14 S B 9920 : 2002 Foreword This translation has been made based o
2、n the original Japanese Industrial Standard revised by the Minister of Economy, Trade and Industry through deliberations at the Japanese Industrial Standards Committee, as the result of proposal for revision of Japanese Industrial Standard submitted by the Japan Air Cleaning Association (JACA)/the J
3、apanese Standards Association (JSA) with the draft being attached, based on the provision of Article 12 Clause 1 of the Industrial Standardization Law applicable to the case of revision by the provision of Article 14. Consequently JIS B 9920 : 1989 is replaced with this Standard. This revision has b
4、een made based on IS0 14644-1 : 1999 Cleanrooms and associated controlled environments-Part 1 : Classification of air cleanliness for the purposes of making easy to compare this Standard with International Standard; to prepare Japanese Industrial Standard conforming with Inter- national Standard; an
5、d to propose a draft of International Standard which is based on Japanese Industrial Standard. Attention is drawn to the possibility that some parts of this Standard may conflict with a patent right, application for a patent after opening to the public, utility model right or application for registr
6、ation of utility model after opening to the public which have technical properties. The relevant Minister and the Japanese Industrial Standards Committee are not responsible for identifying the patent right, application for a patent after opening to the public, utility model right or application for
7、 registration of utility model after opening to the public which have the said technical properties. Date of Establishment: 1975-05-01 Date of Revision: 2002-09-20 Date of Public Notice in Official Gazette: 2002-09-20 Investigated by: Japanese Industrial Standards Committee Standards Board Technical
8、 Committee on Industrial Machinery JIS B 9920 : 2002, First English edition published in 2003-05 Translated and published by: Japanese Standards Association 4-1 -24, Akasaka, Minato-ku, Tokyo, 107-8440 JAPAN In the event of any doubts arising as to the contents, the original JIS is to be the final a
9、uthority. O JSA 2003 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from the publisher. Printed in Japan PROTECTED BY
10、 COPYRIGHT -,-,- B 9920 : 2002 Contents Page Introduction . 1 Scope 2 Normative references 3 Definitions 3.1 General 3.2 Airborne particle 3.3 Descriptors 3.4 Occupancy states . 3.5 Others 4 4.1 4.2 4.3 5 5.1 5.2 5.3 5.4 6 Classification of air cleanliness Occupancy statets) . Classification number
11、. Designation of specification regarding air cleanliness . Demonstration of compliance with air cleanliness Principle Testing . Maximum permitted concentration of airborne particles . Test report Particle measuring test and test frequency . Annex A (informative) Graphical illustration of the classes
12、 of Table 1 . Annex B (normative) Determination of particulate cleanliness classification using a discrete.partic1e.counting. light-scattering instrument Annex C (normative) Statistical treatment of particle concentration data . 4 4 4 5 5 5 5 5 6 6 7 8 12 (i) PROTECTED BY COPYRIGHT B 9920 : 2002 Ann
13、ex D (informative) Considerations for the counting and sizing of particles outside the size range applicable for classification 14 Annex E (normative) Sequential sampling air cleanliness evaluation method 16 Annex 1 (informative) Comparison table between JIS and corresponding International Standard
14、. 18 (ii) PROTECTED BY COPYRIGHT JAPANESE INDUSTRIAL STANDARD JIS B 9920 : 2002 Classification of air cleanliness for cleanrooms Introduction This Japanese Industrial Standard has been prepared based on IS0 14644-1 Cleanrooms and associated controlled environments-Part 1 : Classification of air clea
15、nliness published in 1999 as the first edition with modification in techni- cal contents. In addition, portions underlined with dots are the matters which are modified the corresponding International Standard. A list of modification with its explana- tion is shown in Annex 1. 1 Scope This Standard s
16、pecifies the classification of air cleanliness in cleanrooms and associated controlled environments (hereafter referred to as “cleanroom facili- ties”) exclusively in terms of concentration of airborne particles, and its evaluation method. Only particle populations having cumulative distributions ba
17、sed on threshold (lower limit) sizes ranging from 0.1 ym to 5 pm are considered for classification purposes. However, concentrations of ultrafine particles (particles smaller than O. 1 pm) and macroparticles (particles larger than 5 pm) may be used to quantify these popula- tions in terms of U descr
18、iptors and M descriptors, respectively. This classification shall not be used in order to characterize a physical and chemical nature of airborne particles. Furthermore, the relation between the particle size and maximum permitted concentration specified in this Standard are intended for classifying
19、, and do not express the actual particle size distribution. Remarks : The corresponding International Standard of this Standard shall be as follows: In addition, symbols which denote the degree of correspondence in the contents between the relevant International Standard and JIS are IDT (identical),
20、 MOD (modified), and NEQ (not equivalent) ac- cording to ISODEC Guide 21. IS0 14644-1 : 1999 Cleanrooms and associated controlled environ- ments-Part 1 : Classification of air cleanliness (MOD) 2 Normative references The following standards contain provisions which, through reference in this Standar
21、d, constitute provisions of this Standard. The most recent editions of the standards (including amendments) shall be applied. . _ _._ . JIS B 9921 Light scattering automatic particle counter JIS Z 8101-1 Statistics-Voeabulary and symbols-Part 1 :Probability and gen- eral statistical terms . 3 Defini
22、tions 8122, JIS B 9921 and JIS Z 8101-1, and the following definitions apply. For the purposes of this Standard, the definitions given in JIS 2 . PROTECTED BY COPYRIGHT 2 B 9920 : 2002 3.1 General 3.1.1 classification of air cleanliness Level of airborne particulate cleanliness applicable to a clean
23、room expressed in terms of Class N, which represents maxi- mum allowable concentrations (in particles per 1 m3 of air) for considered sizes of particles. Remarks 1 Level of airborne particulate cleanliness shall be designated by N according to the formula (1) of 4.2, and shall be expressed by Class
24、N. 2 Classification in accordance with this Standard is limited to the range extending from Class 1 through Class 9. 3 Intermediate class may be used as the level of airborne particulate cleanliness with 0.1 the smallest permitted increment; i.e. the range of intermediate classes extends from Class
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