SEMI-F81-2003.pdf
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1、 SEMI F81-1103 SEMI 2003 1 SEMI F81-1103 SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS This specification was technically approved by the Global Gases Committee and is the direct responsibi
2、lity of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on September 3, 2003. Initially available at www.semi.org October 2003; to be published November 2003. 1 Purpose 1.1 The purpose of this specification is to provide visual inspecti
3、on and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. These criteria are meant to ensure that welds are of sufficient quality to
4、provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications. 2 Scope 2.1 This specification defines inspection and acceptance criteria for GTA autogenous butt joint welds of stainless steel and other CRAs in fluid distribution systems. Th
5、e fluid distribution system includes tubing, pipe, fittings, valves, subassemblies and components that contain and distribute fluid. NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish a
6、ppropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 The stainless steels covered by this specification are limited to the austenitic and superaustenitic grades of stainless steel. 3.2 Corrosion resistant metals and
7、 alloys covered by this specification are limited to solid solution grades of nickel alloys and solid solution grades of titanium alloys. 3.3 This specification applies only to autogenous GTA circumferential butt joint welds performed on fluid distribution system components 6 inches (150 mm) or less
8、 in diameter. 3.4 This specification applies only to automatic, mechanized, or machine GTA welding processes. 3.5 This specification applies only to welds performed with no fillers and no fluxes. 3.6 This specification does not apply to pressure vessel or process chamber welds. 4 Referenced Standard
9、s NOTE 1: The following documents become part of the guide to the extent that they are included herein. 4.1 SEMI Standard SEMI F78 Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications 4.2 ASME Standard1 BPE Bioprocessing Equipment Stan
10、dard 4.3 AWS Standard2 AWS QC-1 Standard for AWS Certification of Welding Inspectors AWS A3.0 Standard Welding Terms and Definitions 4.4 ASNT Standard3 ASNT SNT-TC-1A Guideline to Personnel Qualification and Certification in NDT NOTICE: Unless otherwise indicated, all documents cited shall be the la
11、test published versions. 1 American Society of Mechanical Engineers, Three Park Avenue, New York, NY 10016-5990, USA. Telephone: 800.843.2763 (U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside North America), Website: www.asme.org 2 American Welding Society, 550 NW LeJeune Road, P.O. Box
12、 351040, Miami, Florida 33135 SEMI F81-1103 SEMI 2003 2 5 Terminology3 5.1 Definitions 5.1.1 angular misalignment the condition that exists when the tubing angle is unintentionally changed at the weld. 5.1.2 autogenous weld(2) a fusion weld made without filler metal. 5.1.3 automatic arc welding down
13、slope the time during which the welding current is reduced continuously from the final level until the arc is extinguished. 5.1.4 axial misalignment the offset caused by tubing being in line but not centered at the weld. 5.1.5 backing gas an inert gas (or gas mixture) on the interior of the weld joi
14、nt used to prevent or reduce formation of oxides and other detrimental surface substances during welding, and to provide pressure for weld profile. 5.1.6 bead(2) non-standard term for weld bead. 5.1.7 bead overlap in a pulsed weld the amount of coverage of a weld pulse of the previous weld pulse, us
15、ually measured in percentage of the diameter of the pulse. 5.1.8 bead variation the amount of change of ID bead width from one area to another. 5.1.9 bead width the width of the weld bead on the ID, normally measured in units of T, where T is the nominal tube wall thickness. 5.1.10 center line shrin
16、kage a profile-reducing defect or discontinuity normally formed by shrinkage during solidification. 5.1.11 color line acceptance criteria of the maximum amount of discoloration allowed on the weld or adjacent surfaces. 5.1.12 color the darkness of the oxidation of the weld or adjacent surfaces. Non-
17、standard term for discoloration. 5.1.13 concavity(3) a condition in which the surface of a weld is depressed relative to the surface of the tube or pipe. Concavity is measured as a maximum distance from the outside or inside diameter surface of a weld 3 The terminology has been derived from the foll
18、owing sources: (1) Websters New World College Dictionary Fourth Edition (2) ANSI/AWS A3.0 Standard Welding Terms and Definitions (3) ASME BPE Bioprocessing Equipment Standard along a line perpendicular to a line joining the weld toes. 5.1.14 convexity(3) a condition in which the surface of a weld is
19、 extended relative to the surface of the tube or pipe. Convexity is measured as a maximum distance from the outside or inside diameter surface of a weld along a line perpendicular to a line joining the weld toes. 5.1.15 coupon weld sample which is opened for inspection to insure that the weld meets
20、specifications. 5.1.16 coupon-in first coupon prior to production welding of butt weld joint. 5.1.17 coupon-out last coupon after production welding of butt weld joint ends. 5.1.18 discoloration(3) any change in surface color from that of the base metal. Usually associated with oxidation occuring on
21、 the weld and heat affected zone on the outside and inside diameter of the weld joint as a result of heating the metal during welding. Colors may range from pale bluish-gray to deep blue, and from pale straw color to a black crusty coating. 5.1.19 downslope see automatic arc welding downslope. 5.1.2
22、0 dross(2) non-standard term for slag. 5.1.21 electrode(2) non-standard term for tungsten electrode. 5.1.22 enclosed weld head weld head in which the weld joint is held and welded within a closed chamber containing a shielding purge gas. 5.1.23 encroachment non-standard term for ID convexity. 5.1.24
23、 examiner a person who performs examination of a particular object, or evaluates an operation, for compliance to a given standard. The examiner performs quality control for the manufacturer, fabricator, or erector. 5.1.25 fluid(1) liquid or gas. 5.1.26 gas(1) the fluid form of a substance in which i
24、t can expand indefinitely and completely fill its container; form that is neither liquid or solid. 5.1.27 gas tungsten arc welding (GTAW)(3) an arc welding process that uses an arc between a tungsten electrode (nonconsumable) and the weld pool. The process is used with a shielding gas. 5.1.28 halo n
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