07-30153021-DC.pdf

a Date: 14 June 2007 Origin: International Latest date for receipt of comments: 30 September 2007 Project no.: 2006/01869 Responsible committee: GEL/44 Safety of machinery - Electrotechnical aspects Interested committees: Title: Draft BS IEC 60204-33 Safety of machinery Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment Supersession information: If this document is published as a standard, the UK implementation of it will supersede NONE and partially supersede. NONE If you are aware of a current national standard which may be affected, please notify the secretary (contact details below). WARNING: THIS IS A DRAFT AND MUST NOT BE REGARDED OR USED AS A BRITISH STANDARD. THIS DRAFT IS NOT CURRENT BEYOND 30 September 2007. This draft is issued to allow comments from interested parties; all comments will be given consideration prior to publication. No acknowledgement will normally be sent. See overleaf for information on commenting. 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Cross-references The British Standards which implement International or European publications referred to in this draft may be found via the British Standards Online Service on the BSI web site http:/www.bsi-global.com. Direct tel: 020 8996 7424 Responsible Committee Secretary: Mr P Restell (BSI) E-mail: peter.restellbsi-global.com Draft for Public Comment Head Office 389 Chiswick High Road London W4 4AL Telephone: +44(0)20 8996 9000 Fax: +44(0)20 8996 7001 Form 36 Version 7.0 DPC: 07/30153021 DC Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI b Introduction This draft standard is based on international discussions in which the UK has taken an active part. Your comments on this draft are welcome and will assist in the preparation of the consequent standard. If no comments are received to the contrary, then the UK will approve this draft. 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Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI FORM CDV (IEC) 2005-09-23 44/558/CDV COMMITTEE DRAFT FOR VOTE (CDV) PROJET DE COMITÉ POUR VOTE (CDV) Project number IEC 60204-33 Ed.1.0 Numéro de projet IEC/TC or SC: 44 CEI/CE ou SC: Secretariat / Secrétariat United Kingdom Submitted for parallel voting in CENELEC Soumis au vote parallèle au CENELEC Date of circulation Date de diffusion 2007-06-08 Closing date for voting (Voting mandatory for P-members) Date de clôture du vote (Vote obligatoire pour les membres (P) 2007-11-09 Also of interest to the following committees Intéresse également les comités suivants TC 66 Supersedes document Remplace le document 44/519/CD and 44/537A/CC Functions concerned Fonctions concernées Safety Sécurité EMC CEM Environment Environnement Quality assurance Assurance qualité CE DOCUMENT EST TOUJOURS À L'ÉTUDE ET SUSCEPTIBLE DE MODIFICATION. IL NE PEUT SERVIR DE RÉFÉRENCE. LES RÉCIPIENDAIRES DU PRÉSENT DOCUMENT SONT INVITÉS À PRÉSENTER, AVEC LEURS OBSERVATIONS, LA NOTIFICATION DES DROITS DE PROPRIÉTÉ DONT ILS AURAIENT ÉVENTUELLEMENT CONNAISSANCE ET À FOURNIR UNE DOCUMENTATION EXPLICATIVE. THIS DOCUMENT IS STILL UNDER STUDY AND SUBJECT TO CHANGE. IT SHOULD NOT BE USED FOR REFERENCE PURPOSES. RECIPIENTS OF THIS DOCUMENT ARE INVITED TO SUBMIT, WITH THEIR COMMENTS, NOTIFICATION OF ANY RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE AND TO PROVIDE SUPPORTING DOCUMENTATION. Titre : CEI 60204-33: Sécurité des machines Equipement électrique des machines Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs Title : IEC 60204-33: Safety of machinery Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment ATTENTION VOTE PARALLÈLE CEI CENELEC Lattention des Comités nationaux de la CEI, membres du CENELEC, est attirée sur le fait que ce projet de comité pour vote (CDV) de Norme internationale est soumis au vote parallèle. Un bulletin de vote séparé pour le vote CENELEC leur sera envoyé par le Secrétariat Central du CENELEC. ATTENTION IEC CENELEC PARALLEL VOTING The attention of IEC National Committees, members of CENELEC, is drawn to the fact that this Committee Draft for Vote (CDV) for an International Standard is submitted for parallel voting. A separate form for CENELEC voting will be sent to them by the CENELEC Central Secretariat. Copyright © 2007 International Electrotechnical Commission, IEC. All rights reserved. It is permitted to download this electronic file, to make a copy and to print out the content for the sole purpose of preparing National Committee positions. You may not copy or “mirror“ the file or printed version of the document, or any part of it, for any other purpose without permission in writing from IEC. Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV © IEC 2 CONTENTS 1 Scope.12 2 Normative references13 3 Definitions 15 4 General requirements .24 4.1 General considerations24 4.2 Selection of electrical equipment25 4.3 Electrical supply 25 4.3.1 General .25 4.4 Physical environment and operating conditions 25 4.4.1 General .25 4.4.2 Electromagnetic compatibility (EMC) 26 4.4.3 Contaminants 27 4.4.4 Ionizing and non-ionizing radiation .27 4.4.5 Vibration, shock, and bump27 4.5 Transportation and storage27 4.6 Provisions for handling 27 4.7 Installation.27 5 Incoming supply conductor terminations and devices for disconnecting and switching off .27 5.1 Incoming supply conductor terminations.27 5.2 Terminal for connection to the external protective earthing system .28 5.3 Supply disconnecting (isolating) device 28 5.3.1 General .28 5.3.2 Type28 5.3.3 Requirements 29 5.3.4 Operating means .29 5.3.5 Supply disconnecting device mounting .30 5.3.6 Supply disconnecting device door interlock.30 5.3.7 UPS disconnection.30 5.4 Additional disconnecting devices30 5.5 Protection against unauthorized, inadvertent and/or mistaken connection of plug/socket combination 31 6 Protection against electric shock.31 6.1 General .31 6.2 Protection against direct contact 31 6.2.1 General .31 6.2.2 Protection by enclosures31 6.2.3 Protection by insulation of live parts .32 6.2.4 Protection against residual voltages .32 6.3 Protection against indirect contact .33 6.3.1 General .33 6.3.2 Prevention of the occurrence of a touch voltage .33 6.3.3 Protection by automatic disconnection of supply.33 6.4 Protection by the use of PELV34 6.4.1 General requirements 34 Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV © IEC 3 6.4.2 Sources for PELV 35 6.4.3 Design to minimise risks of live working .35 6.5 Protection of skilled persons and instructed persons against inadvertent contact with hazardous-live-parts.35 6.5.1 General .35 6.5.2 Obstacles 35 6.5.3 Probe holes .35 7 Protection of equipment 35 7.1 General .35 7.2 Overcurrent protection.36 7.2.1 General .36 7.2.2 Supply conductors .36 7.2.3 Neutral conductor protection 36 7.2.4 Socket outlets and their associated conductors 36 7.2.5 Lighting circuits36 7.2.6 Transformers.36 7.2.7 Location of overcurrent protective devices37 7.2.8 Overcurrent protective devices.37 7.2.9 Rating and setting of overcurrent protective devices.37 7.3 Protection of motors against overheating .38 7.3.1 General .38 7.3.2 Overload protection39 7.3.3 Over-temperature protection 39 7.3.4 Current limiting protection 39 7.4 Abnormal temperature protection.39 7.5 Protection against supply interruption or voltage reduction and subsequent restoration.40 7.6 Motor overspeed protection40 7.7 Earth fault/residual current protection.40 7.8 Phase sequence protection40 7.9 Protection against overvoltages due to lightning and to switching surges40 7.10 Electrolytic capacitors41 8 Equipotential bonding .41 8.1 General .41 8.2 Protective bonding circuit.43 8.2.1 General .43 8.2.2 Protective conductors 43 8.2.3 Continuity of the protective bonding circuit .43 8.2.4 Exclusion of switching devices from the protective bonding circuit 44 8.2.5 Parts that need not be connected to the protective bonding circuit44 8.2.6 Protective conductor connecting points 45 8.2.7 Mobile machines45 8.2.8 Additional protective bonding requirements for electrical equipment having earth leakage currents higher than 10 mA AC or DC45 8.3 Functional bonding 46 8.4 Measures to limit the effects of high leakage current46 9 Control circuits, emergency off (EMO), and protective interlock circuits .46 9.1 Control circuits 46 9.1.1 Control circuit supply .46 9.1.2 DC circuits derived from an AC supply .46 Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV © IEC 4 9.1.3 Start functions .46 9.1.4 Stop functions46 9.1.5 Operating modes .47 9.1.6 Suspension of safety functions and/or protective measures 47 9.2 Emergency Off (EMO) .47 9.2.1 General .47 9.2.2 Circuits to be de-energized 48 9.2.3 Requirements for EMO circuits.48 9.3 Operations other than emergency off .48 9.3.1 General .48 9.3.2 Start 48 9.3.3 Stop.49 9.3.4 Other control functions.49 9.3.5 Cableless control .50 9.4 Protective interlock circuits 50 9.4.1 General .50 9.4.2 Protective interlock circuit design.50 9.5 Multiple control stations .51 10 Operator interface and sensing devices mounted on the fabrication equipment52 10.1 General .52 10.1.1 General device requirements .52 10.1.2 Location and mounting.52 10.1.3 Protection52 10.1.4 Portable and pendant control stations 52 10.2 Push-buttons .53 10.2.1 Colours53 10.2.2 Markings53 10.3 Indicator lights and displays.54 10.3.1 General .54 10.3.2 Colours54 10.3.3 Flashing lights and displays .55 10.4 Illuminated push-buttons55 10.5 Rotary control devices .55 10.6 Start devices .55 10.7 Emergency off devices.55 10.8 Emergency stop devices 56 10.9 Enabling control device56 11 Controlgear: location, mounting, and enclosures .56 11.1 General requirements 56 11.2 Location and mounting.56 11.2.1 Accessibility and maintenance56 11.2.2 Physical separation or grouping .57 11.2.3 Heating effects 57 11.3 Degrees of protection 57 11.4 Enclosures, doors and openings 58 12 Conductors and cables .59 12.1 General requirements 59 12.2 Conductors59 12.3 Insulation.59 Licensed Copy: London South Bank University, London South Bank University, Tue Jul 03 01:06:32 GMT+00:00 2007, Uncontrolled Copy, (c) BSI 60204-33/Ed.1 CDV © IEC 5 12.4 Current-carrying capacity in normal service60 12.5 Conductor and cable voltage drop60 12.6 Flexible cables.60 12.6.1 General .60 12.6.2 Mechanical rating.60 13 Wiring practices61 13.1 Connections and routing 61 13.1.1 General requirements 61 13.1.2 Conductor and cable runs 61 13.1.3 Conductors of different circuits.62 13.1.4 Conductors smaller than 50 mm2.62 13.1.5 Temperature exposure of conductors .62 13.1.6 Terminal temperatures.62 13.2 Multi-outlet assemblies 62 13.3 Plug/socket combinations 62 13.4 Identification of conductors 63 13.4.1 General requirements 63 13.4.2 Identification of the protective conductor 63 13.4.3 Identification of the neutral conductor.63 13.4.4 Identification by colour .63 13.4.5 Wiring inside enclosures64 13.5 Wiring outside enclosures64 13.5.1 General requirements 64 13.5.2 Plug/socket combinations external to electrical enclosures.64 13.5.3 Cables and conductors external to the electrical enclosure.65 13.5.4 Ducts.65 13.5.5 Pendant control stations.65 13.5.6 Strain relief65 13.5.7 Protection of flexible cables .65 13.5.8 Clearance between cables and moving parts66 13.5.9 Clearance between flexible conduit and moving parts.66 13.5.10 Interconnection of electrical equipment 66 13.5.11 Dismantling for shipment66 13.6 Ducts, connection boxes and other boxes 66 13.6.1 Cable trunking systems67 13.6.2 Fabrication equipment compartments and cable trunking systems 67 13.6.3 Connection boxes and other boxes.67 14 Electric motors and associated equipment 67 14.1 Gener