1、INTERNATIONA1.STANDARDISO1463editionF(Wrth202105Meta1.1.icandoxidecoatings一Measurementofcoatingthickness一Microscopica1.methodReVetementSmGtaHiquesetcouchesdoxydeMesuragedeVepaisseurderevetementMethodeparcoupemicrographiqueISOR43cgo2itE!)O1.SO2021COPYRIGHTPROTECTEDDOCUMENTISO2021岫rkdea/山thUcdOthcnvis
2、cjftc三orrtmcehDVBiwixuioiti08phnn11UatiocBhrhotocp)Mng,ptbcatonpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanherequestedfromeitherISOattheaddressbe1.oworISsmemberbodyinthecountryoftherequester.%,tft晒Iandonnet8CH-1214*crnicr,GenevaPhone：M1.22749O1.11Pub1.ishedinSwitzerhn
3、dMeta1.1.icandoxidecoatings-MeasurementofcoatingthicknessMicroscopica1.methodWARNINGTheuseofthisdocumentcaninvo1.vehazardousmateria1.s,operationsandequipment.Thisdocumentdoesnotpuporttoaddressa1.1.ofthesafetyprob1.emsassociatedwithitsuse.Itistheresponsibi1.ityofusersofthisdocumenttotakeappropriateme
4、asurestoensurethesafetyandhea1.thofpersonne1.priortotheapp1.icationofthedocument1 Scope1.ayers,porce1.ainmicroscope.vitreousename1.coatings,bythemicroscopica1.examinationofcross-sections2 Normativereferences3 Termsanddefinitionsnatthefo1.1.owingISOandIECmaintaintermino1.ogica1.databasesJbrJSr1.Stand
5、ardizaUoaddresses:3.1 IECE1.ectropedia:avai1.ab1.eathttpwww.e1.efIteV118W3fbes6ftgEttW三re小wP1三Wganda1.sobyexcessiveabrasionofbritt1.emateria1.sduringpreparationofcross-sections.5.4 RoundingofedgeofcoatingIftheedgeOfthecoatingcross-sectionisrounded,i.e.ifthecoatingcross-sectionisnotcomp1.ete1.yf1.atb
6、ptn0Few6hffthgtitcttw:dfcdtnRbtctbsgHdingviMii1.f1.th*gtC3(sedspecimenbeforemounting(seeA.2).5.5 Overp1.atingOverp1.atingofthetestspecimenprotectsthecoatingedgesduringpreparationofcross-sectionsanddverFirmwjiCsnenibrieoiitamthjnkBfneiReInosaiiofmentxoatingmateria1.duringsurfacepreparationfor5.6 Etch
7、ingOptimumetchingproducesac1.ear1.ydefinedandnarrowdark1.ineattheinterfaceoftwometa1.s.517essiveS11nehingproducesapoor1.ydefinedorwide1.inethatcanresu1.tinerroneousmeasurementIH赧bperoBSMH墀丽8Qp1.atiH的也四悌m蝴UngaSW牌照negate”色师Wb1.创作Sfera1.1.eviatedbyrepeatingthepreparationofthecross-sectionofthecoatedmet
8、a1.unti1.repeatabi1.ityofthethicknessmeasurement(seeA.3andA.5)isobtainedanda1.sobyoverp1.atingwithahardermeta1.5.8 MagnificationForanygivencoatingthickness,measurementuncertaintygenera1.1.yincreaseswithdecreasingmagnification.Themagnificationshou1.dbechosensothatthefie1.dofviewisbetween1,5and3Xtheth
9、ickness.5.9 Ca1.ibrationofstagemicrometerAnyuncertaintyinca1.ibrationofthestagemicrometerwi1.1.beref1.ectedinthemeasurementoftheg1.Qmen.Ca1.HMtQcigtiferaceabtenriidrosdepgtanbandsrtijIImeasuringdevice1.1.1 1MicrometereyepieceAfi1.armicrometereyepieceprovidesasatisfactorymeansofmakingthemeasurementof
10、thespecimen.iF0eratornc5iafidBcWte1.beytiecerriuIaecuratecriibthtipriotatdftheahbepiecndiswithsavcdmpixe1.adjustmentand/ornoca1.ibra1.ionarcapp1.iedstab1.etube.Iongapp1.icab1.eFurthermoreJntenncdiatemagnificationNorma1.1.y,knowndistances.torecordindeviationbetweeninterva1.smeasured1.engthandstageOii
11、crometerand5.11 UniformityofmagnificationthatmeasuredboundariesCentredmeasurementoptica1.madeoverthesameportionofthefie1.dofviewwith5.12 1.ensqua1.ityNOTEOrientationmeasuringIincsbeimprovedbyusingmonochromatic1.ight.EnsureprocessingmovementofIheperpendicu1.artoeyepieceboundariesa1.ignmentorcoatingcr
12、oss-section,a.5A1.ternativetothec1.assica1.meta1.1.ographicmethoddescribedinAAto.4Ionbeammi1.1.ing(orionbeamcutter)devicesworkingwithabroadargon-ionbeamCanbeusedtocDstcp11oduzjfbMwftwMsnwtodrihrtrogcbasi11w1.1.11a1.sptjIihodtifihnp1.cj1.fcmearirinftRwiitititeiMntiiicria1.sordisruptionsofbritt1.emate
13、ria1.s.A.6MeasurementThemeasuringdevicemaybeadigita1.imageprocessingsoftware,afi1.armicrometeroramicrometerBP/m?ce.s(三hei1.电岬填iedoVKenMmiSH&ustfhHtbeti脸SerVtaIrCUghh5tnxUrthgou6it.WepHtnojmGntantheimageprojectedonagroundg1.assp1.ateisusua1.1.y1.esssatisfactorybecauseofthe1.ackofsharpnessoftheimagean
14、dpoor1.egibi1.ityoftheru1.erwhentheprojectedimageisvisib1.e.WW啜的钟醐桐啖aaepeftsuringg戈港fih颐G皿fb6M留w酶t1.蹄Mi四WggCforeprocessing,week1.y,month1.yorquarter1.yca1.ibrationinterva1.scanusua1.1.ybeproventobesufficient.Whenmakingca1.ibrationandcoatingmeasurementsbothshou1.dbemadebythesameoperator(1.esscritica1
15、fordigita1.imageprocessing),thestagemicrometerandthecoatingshou1.dbecentredinthefie1.d,andeachmeasurementatapointshou1.dbemadeat1.easttsviceandaveraged.帐任刷色神碟飒卜钿1就限Hts制机Sdeprep三(三即&蜘跋UOnSandmRfe便determinationofcoatingthickness,shou1.dbeperformedat1.easttwice.Withgoodtechniquesandequipment,andsmooth
16、coatingandsubstratesurfaces,repeatabi1.itywithin2%or0,5m,whicheveristhegreater,isreasonab1.e.Somemicroscopesaresubjecttoaspontaneousmovementofthestagere1.ativetotheobjective,possib1.yduetonon-uniformtherma1.effectsfromthe1.ightsource.SuchamovementduringthemeasurementGMh忸8的gantW?.例WftWfrementn做盛种j1.t
17、KiHddera储刎IW破国附礴1.t1.aM呈砒Bfronfhf1.MizedandoncefromrighttoIcf1.Digita1.imageprocessingisusua1.1.ynotaffectedbythiseffect.Ifthestagemovesduringimagecapture,theimagewou1.dbedistorted,discardedandonewou1.danywaytakeitagain.(informative)Ifthesamp1.epositiondeviatesfromtheperpendicu1.ar(seeFigureB.1.),hi
18、ghermeasuringva1.ueswi1.1.beThecoatingthicknessdcanbeca1.cu1.atedusingFormu1.a(B.1.):whereisthecoatingthicknesswhen=0;isthedeviationofthecross-sectionfromtheperpendicu1.arofthecoatingsurface,indegrees；sectionDirectionOfobserVation.B.2Measurementoftooth-constructedcoatings8.2.1 Princip1.eThismethodca
19、nbeusedfordeterminingthecoatingthicknessforcoatingsboundedbyatoothconstruction,e.thermochemica1.1.yproducedboride-nitridecoatings.Thecoatingthicknessismagnified200andmeasuredbyascreen1.inedistanceof2mmbetweentheboundary1.ineofthecoatingoverasuita1.e40t1.1.engthofforexamp1.e,100mm(seeFigureB.2).Catin
20、gSsubstrateFigureB.2DiagrammaticrepresentationofthethicknessdeterminationofcoatingswithtoothconstructionB.2.2Eva1.uationThearithmetica1.averageva1.ueforcoatingswithtoothconstructionisca1.cu1.atedfromsing1.eva1.ues.JbgieestQhttaittidcwhwtip11)yidcsanindicationoftheirregu1.aritiesoftheboundarysurface(
21、i.e.theB.3Empirica1.va1.uesforthestandarddeviationofmeasurementsobtainedby1.ightmicroscopyUnderrepeatabi1.ityconditions,thestandarddeviation,fis0r3m.Underreproducibi1.ityconditions,thestandarddeviationis0,8m.(irnphfiednotation):Basedonthestatedstandarddeviations,Tab1.eB.1.indicatestheconfidenceinter
22、va1.,q,ofthe1.oca1.coatingthickness.Theva1.uesinthetab1.eapp1.ytoastatistica1.certaintyof95%ca1.cu1.atedwith(B.2)wherenisthenumberofmeasurementva1.uesfromwhichthe1.oca1.coatingthicknesshasbeenca1.cu1.ated;isthestandarddeviation.Therefore95%ofa1.1.measurementresu1.tsarewithintherangeofthe1.oca1.coati
23、ngthicknessq(see1.3tUe9d2-).Re1.ativeuncertaintyin%ofthe1.oca1.coatingthicknesswithastatistica1.certaintyof95%1.oca1.coatingthicknessqRepeatabi1.ityconditions三03mnnReproducibi1.ityconditionsa三0,8mnn500,70,41,811000,40,20,905AnnexC(informative)Sometypica1.etchantsforuseatroomtemperatureWARNINGPrecaut
24、ionsshou1.dbetakeninthepreparation,use,hand1.inganddisposa1.oftheseetchants(seeTab1.eC1.).Tab1.eC.1.-Sometypica1.etchantsforuseatroomtemperatureNo.EtchantApp1.ication1PNitricacidso1.ution(三1,42gm1.):5m1.nJitm:V.UW1.inprtxrh-cvIirtX也，dMxiotr用碘:%Fornicke1.orchromiumcoatingsonstee1.Etchesstee1.PPPmga1.
25、1.oys：striKtures.d1.5tngMisbeseach1.ayerofmde1.byidentify-PPPDisti1.1.edwater:93m1.Etchcsa1.uminiumanditsa1.1.oys.PIica(seeBib1.iography1ISOmeasurementthicknessotherinorganiccoatingsDefinitionsandconventions3concerningMeta1.1.oberf1.ache,1955,7,pp.8-11-A1.1.rightsreservedthe2064:1996rOfMetaIIicand2BarghoornH.,Verg1.eichendeUntersuchungenvonSchichtdicke-Messverfahren,RayG.P.,Thicknesstestingofe1.ectrop1.atedandre1.atedcoatings,E1.ectrochemica1.Pub1.ications1.td.,A5ahiHouse,10ChurchRoad.PortErinrIs1.eofMan,U.K.,1993,ISBN0901150274ICS25.220.20;25.220.40Pricebasedon13pages
