TFT相关中英文对照表.doc

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1、精品文档，仅供学习与交流，如有侵权请联系网站删除工艺流程、材料、设备、生产常用中英文标准名称 版 号： 1.0 总 页 数： 20 制定部门： 生效日期： 年 月 日 拟 制： 审 核： 标 准 化： 会 签： 批 准： 发布 实施 更改状态更改内容更改人更改日期一TFT工艺流程中英文标准名称Array Process Flow阵列段工艺流程Input投料Unpacking拆包装Initial clean预备清洗Particle count尘埃粒子测试Gate栅电极层Clean before depo成膜前清洗Gate （Mo/Al alloy ) Film depo栅电极成膜RS meter

2、电阻测量Macro Inspection宏观检查Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry(VCD)光刻胶低压干燥PR soft bake前烘Expose曝光Titler Expose/Edge Expose打标/边缘曝光Develop显影PR hard bake坚膜ADI 显影后自动光学检查Mic/Mac Inspection宏微观检查CD after develop显影后关键尺寸检查Total pitch长寸测量Gate Wet etch栅电极湿刻Contact angle接触角测量PR strip光刻胶剥离CD a

3、fter etch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Laser Repair激光修补Active层Clean before depo成膜前清洗Active film depoActive成膜AOI自动光学检查Macro Inspection宏观检查Thickness Measurement厚度测量Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Develop显影PR hard bake坚膜ADI显影后自动光学

4、检查Mic/Mac Inspection宏微观检查Active film Dry etch & AshingActive膜干刻与灰化Thickness Measurement厚度测量PR strip光刻胶剥离AEI刻蚀后自动光学检查Mic/Macro Inspection宏微观检查S/D源/漏电极层Clean before depo成膜前清洗S/D Mo film depo源/漏电极成膜RS meter电阻测量MACRO Inspection宏观检查Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft

5、bake前烘Expose曝光Edge expose边缘曝光Develop显影PR hard bake坚膜ADI 显影后自动光学检查MIC/MAC Inspection宏微观检查CD after develop显影后关键尺寸检查Hard bake by oven烘炉坚膜S/D Mo Wet etch源电极/漏电极湿刻n+ a-Si Dry etchn+高掺杂膜干刻PR strip光刻胶剥离Thickness Measurement厚度测量CD after etch刻蚀后关键尺寸测量AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Clean before O/S te

6、st短路/开路测试前清洗Open/Short Test短路/开路测试Passivation保护层Clean before depo成膜前清洗Passn film depo保护膜成膜AOI自动光学检查MACRO Inspection宏观检查Thickness Measurement厚度测量Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Edge expose边缘曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查Micro/Macro Inspect

7、ion宏微观检查SinX Dry etch & ASHING氮化硅干刻与灰化PR strip光刻胶剥离AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查ITOITO层Clean before PR成膜前清洗a-ITO film depoITO成膜RS meter电阻测试Anneal煺火Macro Inspection宏观检查Clean before PR涂胶前清洗Pre bake预烘PR Coating光刻胶涂布PR vacuum dry光刻胶低压干燥PR soft bake前烘Expose曝光Develop显影PR hard bake坚膜ADI显影后自动光学检查M

8、icro/Macro Inspection宏微观检查ITO film etchITO膜湿刻PR strip光刻胶剥离AEI刻蚀后自动光学检查Micro/Macro Inspection宏微观检查Final E/T最终电测Anneal煺火Array test阵列测试Array repair阵列修补TEG testTEG测试Sort分级Cell Process flow制盒段工艺流程CF Input彩膜投料CF Initial Clean彩膜预备清洗CF AOI彩膜自动光学检查CF Sort彩膜分级PI配向膜Clean before PI 配向膜涂布前清洗PI Print配向膜涂布Pre-cure

9、预固化PI Inspection配向膜检查PI Thickness Measurement配向膜厚度测量Main-cure固化PI rework配向膜返工ODFCF&TFT MatchingCF&TFT匹配Rubbing配向摩擦Rubbing Inspection摩擦检查Loader & Un loader上料机/下料机Buffer缓冲器CST Buffer工装栏缓冲器Rotation/Cooling Unit旋转/冷却单元Turn Align Unit旋转/对位单元Turn Over Unit翻转单元After Rubbing Cleaner摩擦后清洗Spacer Spray衬垫球散布Spa

10、cer Counter衬垫球计数Spacer rework衬垫球返工Spacer Cure衬垫球附着固化Short Dispense导电胶涂布Sealant Dispense边框胶涂布Seal Inspection边框胶检查LC Dispense液晶滴下Vacuum Assembly真空贴合UV Cure紫外线固化Mis-alignment check错位检查Seal Oven边框胶热固化Eye Inspection目视检查Cell gap Measurement盒厚测试Cutting切割1/4(1/6)Sheet Cutting,1/4(1/6)切割Stick Cutting,切条Cell

11、Cutting切粒Visual TestVisual 测试ECPEdge Grind磨边Dipping clean浸泡式清洗Clean before Pol 贴片前清洗Pol Attach贴片Pol Inspection贴片检查Pol rework贴片返工Auto ClaveAuto Clave消泡Laser TrimmerLaser Trimmer激光切线Test测试Gross Test终检Repair修补Bin sorter分级OQC Test出货检查Store货栈Module Process Flow模块段工艺流程COGPad cleaning端子清洗IC BondingIC 邦定Mic

12、roscope InspectionAOI 镜检自动光学检查Adhesive test粘接力测试FOGACF AttachingACF 粘贴FOG BondingFOG 邦定Microscope Inspection镜检Peeling strength test拉力测试ET test1电测1IC or FPC Repair修补UV glue sealing 封胶FPC reinforcement补强UV glue curingUV胶固化Assembly组装ET test2电测2anti-ultraviolet tape attaching遮光胶带粘贴protected tape attachi

13、ng保护胶带粘贴Backlight assembly背光源组装Backlight soldering背光源焊接Touch panel assembly触摸屏组装Final ET test最终电测Rework返工Aging老化QC testQC检验Code printing喷码Packing包装OQC Test出货检验Finished good shipment合格品出货CIM name集成控制系统名称CIM计算机集成制造系统CIM System计算机集成制造系统Manufacturing Execution System(MES)制造执行系统（MES）Preventive Maintenanc

14、e System(PMS)设备预防保养系统（PMS）Statistical Process Control(SPC)统计过程管理（SPC）Equipment Automation Program(EAP)设备自动化（EAP）Report报表Engineering Data Analysis(EDA)工程数据分析（EDA）Finished Good Management System(FGMS)成品管理系统（FGMS）Product产品Glass玻璃基板Panel面板Process Flow工艺流程Operation操作EDC工程数据收集Equipment设备Chamber腔体Unit单体Sub

15、 Unit副单体Port端口OIC (Operator Interface Client)操作者界面EDB工程数据库FGMS成品管理系统Dispatcher派货Create建立Start下线Scrap报废Un scrap取消保废Complete完成Ship出货Un ship取消出货Receive收料Track In入账Track Out出账Wait等待Hold滞留Release释放Rework返工Vehicle搬运车Robot机械手AGV (Automatic Guided Vehicle)自动搬运车MGV (Manual Guided Vehicle)人工搬运车Clean lifter净化电

16、梯LIM (Linear Induction Motor) Carrier线性感应马达传送载具OHS (Overhead Handling System)天车搬送系统Stocker (clean depot)工装篮存放架Battery电池Bay作业区Inter-bay作业区和作业区之间Intra-bay作业区之内Bumper减震缓冲器Charger充电器Controller控制器Conveyor传送带Crane吊车（在Stocker内）FFU (Fan Filter Unit)风扇过滤器Host主机I/O (Input / Output)输入/输出IR (Infra-Red)红外线IRIF(I

17、nfra-Red Interface)红外接口Load上料Unload下料Magnetic tape磁条(AGV路径所使用的磁条)Retrieve检索RTM (Rotary Transfer Machine)旋转传送机构SCARA armAGV传送臂Reset重新设定Transportation传输Recipe工艺参数的组合Stock out将工装篮取出货栈Request要求,请求Transfer传送,运送Instruction命令,指令Select选择Cancel取消Operation作业,操作Support支援,支持Process工艺Start开始Batch批量Lot批(指生产线的在制品或

18、产品控制单位)ID (Identity)识别码(如Lot ID or Chip ID)Sheet片(Array区玻璃基版计数单位)Inspection检验Defect缺陷Hold滞留Release释放Equipment设备（简称为EQP）Tool工具,机台WIP (Work In Process)在制品（工艺在制品）Maintenance维修保养Cassette工装篮(阵列段),卡匣(制盒段及模块段)Empty空的Reserve预备Report报告Rework返工Log on登录，入系统Log off注销登录，离开系统Note批注Unpacking line拆包线Un packer拆包机Gla

19、ss conveyor玻璃传送带Initial Cleaner预清洗Un loader下料机Cassette Manual Guide Vehicle (MGV)工装篮人工搬运车Array CassetteArray工装篮ODF CassetteODF工装篮Automated Material Handling System(AMHS)自动物料搬运系统Clean Stocker(STK)洁净工装篮存放架（STK）Overhead Handling System (OHS)天车搬送系统（OHS）Material Control System (MCS)物料控制系统（MCS）Clean Robot

20、洁净机械手Loader/Un loader上/下料机Sorter分片机二TFT材料中英文标准名称类型TypeMaterials name材料名称玻璃GlassGlass玻璃基板Color filter彩色滤光膜Bare glass白玻璃基板LCD Panel液晶面板靶材TargetAlNd/Al Target铝钕/铝靶材MoNb/Mo Target钼铌/钼靶材ITO TargetITO靶材化学液体ChemicalAl EtchantAl蚀刻液ITO EtchantITO蚀刻液HNO3硝酸CH3COOH乙酸Developer显影液Stripper剥离液MEA单乙醇胺Photo Resist光刻胶

21、Organic Photo Resist有机膜用光刻胶Thinner稀释剂NMPN-甲基-2-吡咯烷酮HF氢氟酸Acetone丙酮IPA异丙醇Ethanol酒精辅助器材Sub materialPhoto Mask光罩APR PlateAPR版Rubbing Cloth摩擦绒布Adhesive Tape双面胶布Probe frame for array tester阵列电测架E/T Frame电测用探测架Cell ET Probe Unit屏电测用探测头Open/Short tester and prober开路、短路电测用探测头Teflon Tape特氟龙带Silicon rubber硅胶皮W

22、iper Tape无尘卷布高纯气体High purity gasNF3三氟化氮SiH4硅烷SF6六氟化硫NH3氨气Cl2氯气HCL氯化氢CHF3三氟甲烷PH3磷烷CF4四氟甲烷N2氮气O2氧气H2氢气Ar氩气He氦气液晶LCLC液晶材料胶膜FilmPolarizer偏光片Diffuser散光膜涂料DopePaintPI聚酰亚胺树脂ResinSealant边框胶UV glueUV胶ACF各向异性导电膜Conductive Spacer导电衬垫球Spacer used in Sealant边框胶内衬垫球Spacer used in Cell（White）盒内衬垫球(白）Spacer used in

23、 Cell（Black）盒内衬垫球(黑）元器件PartsBack Light Unit背光源Integrated circuit/Driver IC集成电路/驱动ICPCB印刷电路板FPC柔性印刷线路板Module Frame模块外框Touch Panel/Touch film触摸屏/触摸膜RCL阻容器件焊接材料SolderingmaterialFLUX助焊剂SOLDER CREAM焊锡/焊接剂三TFT设备中英文标准名称English name中文名称PHOTO曝光Exposer曝光机Coater Developer陈列黄光制程清洗机-涂布机-显影机long size measuring an

24、d critical dimension measuring multiple equipment测长仪和线宽测量仪 Titler& Edge Exposer打标机和边缘曝光复合机 Edge Exposer边缘曝光机AFM原子力显微镜FIB聚焦离子束系统FE-SEM场发射扫描电子显微镜UV MeterUV照度计EXCIMER UV准分子紫外清洗机Ionizer Bar除静电棒Fire Extinguisher灭火器Photo Ionizer软X射线静电消除器PVD&WET溅射&湿式PVD(Multi-chamber type sputtering system)磁控溅射成膜机Particle

25、counter尘埃粒子测量仪Ultrasonic Cleaner超声波清洗机Stripper脱膜机Contact Angle Analyzer接触角测量仪RS Meter(4point Probe)四探针仪Cassette Cleaner工装篮清洗机Initial Cleaner预备清洗机Pre CVD cleaner成膜前清洗机HF Cleaner before S/DS/D成膜前带HF清洗机Liquid Particle Counter液体内尘埃粒子测量仪CCSS中央化学品供应系统Anneal Oven 退火炉Hard Bake Oven后烘炉Film Tester薄膜附着力测试仪 Etc

26、hant Concentration Management System刻蚀液浓度管理系统DMS显影液浓度管理系统DRS显影液溶剂回收系统RMS剥离液浓度管理系统Wet Etcher湿刻机4.5G-Macro Review System4.5G宏观检查机4.5G-Mic/Mac Review System4.5G宏观、微观检查机RGA(Residual Gas Analyzer)残余气体分析仪PECVD化学气相沉积Hot N2 Transfer System热N2供应系统PECVD等离子增强化学气相淀积设备Special Gas Supply & Monitor System特种气体供应和监视

27、管理系统Temperature Recorder温度记录仪Gas Scrubber for PECVDPECVD用尾气处理装置Full Automatic Spectroscopic Ellipsometer for Flat Panel Display平板显示用全自动椭圆偏振光谱仪Clean Crane洁净室起重机设备Spectroscope Reflectometer平板显示用全自动分光反射光谱仪He Leak Detector氦气检漏仪DRY干刻Dry Pump for CVD化学气相沉积设备用真空泵Dry Pump for PVD物理气相沉积设备用真空泵EPD for Dry Etch

28、ing干刻终点侦测器Dry pump for Dry Etching干刻机设备用真空泵Dry Etching/Ashing System 干刻灰化一体机Profiler System段差量测机Chiller for Dry Etching干刻机辅助设备冷却器Local Scrubber System for Dry Etching干刻用废气处理设备CELL制盒Rubbing Line摩擦线Before PI cleanerPI前清洗机Cassette BF 工装篮缓冲器PI PrinterPI涂布机Pre-Cure预固化炉Main-Cure主固化炉Loader/Un loader上下料机APR

29、 cleanerAPR板清洗机Rubbing Inspection摩擦检查机After Rubbing Cleaner摩擦后清洗机ODF SystemODF相关设备 Seal Dispenser边框胶涂布机Short Dispenser导电胶涂布机Seal De-bubbling machine边框胶脱泡机 UV cure紫外线固化机Spacer Cure Oven衬垫球固化炉Cooling /Rotation Unit冷却/旋转装置Seal Cure Oven边框胶固化炉LC dispenser液晶滴下机LC de-bubbling液晶脱泡机Vacuum Assembly真空贴合系统Mis-

30、align Checker对位检查机 Visual Inspection目视检查机ODF Inline transfer and line control blockODF联线传输和软件控制系统Loader(3port)上料机Un loader(3port)下料机Cassette Buffer卡匣缓冲器Turn Align Buffer旋转对位缓冲器Pairing/NG Buffer配对/不良制品缓冲器Spacer NG Buffer衬垫球散布不良制品缓冲器Turn Over Align翻转对位器UV Mask stockUV Mask 存储柜Buffer after UV cure紫外线固化

31、后缓冲器Cooling Buffer冷却缓冲器Spacer US Cleaner衬垫球超声波清洗机Spacer Remover(USC)衬垫球聚团去除装置（超声波清洗机）US Cleaner after sealant dispensing边框胶涂布后超声波清洗机US Cleaner after short dispensing点胶后超声波清洗机Master PLC主PLCCIM PCCIM PCSeal Inspection边框涂布检查机Cell Gap Inspection盒厚检查机Dry Spacer Spray & Spacer count干式散布机衬垫球计数器Auto Clave偏光

32、片贴附后加压消泡机Edge Grinder液晶面板磨边机LCD Panel cleaning and Polarizer attach system液晶面板清洗和偏光板贴附机系统Panel Cleaner面板清洗机（用于液晶面板清洗和偏光板贴附机系统）Polarizer Attach Machine偏光板贴附机（用于液晶面板清洗和偏光板贴附机系统）LCD Panel Polarizer Rework Machine液晶面板偏光片返工机Cell Cassette(3-10.4)3-10.4Cell卡匣Single head scriber单刀头切割机LCD glass in-line Scrib

33、er液晶面板在线切割机Multi head Scriber多刀头切割机MODULE模块COG bonding machine自动COG邦定机COG Semi-automatic Bonding Machine半自动COG邦定机Aging test system老化测试系统Signal generator for LCD InspectionLCD检查用信号发生器Auto Optical Inspection自动光学检测仪Air Particle Counter空气尘埃粒子测量仪Backlight tester背光源色度亮度测量仪Projector投影仪Microscope 显微镜Ionizer

34、 blower离子风扇Surface resistance test kit（点检）表面电阻测量仪Charged Plate Monitor平面带电测试仪Static electricity voltage testing 静电电压测量仪TEST测试ADI-AOI显影后检测AEI-AOI刻蚀后检测CF-AOI彩色滤光片检测Array Tester阵列电测机Open/Short tester and prober开路/短路检测和探针系统ARRAY O/S probe开路/短路探针系统TEG ProberTEG探针系统TEG TesterTEG测试系统Probe Unit for TEGTEG测试

35、用探针系统Array repair激光修补系统Array Probe frame阵列电测架Visual test probe unit目测用探针系统ET Probe unit2英寸电测用探针系统Microscope显微镜（Panel）Microscope and laser system带激光的显微镜 Barcode Reader条形码阅读器Fixed 2D Code Reader 2维读码器系统(固定类型)Portable 2D Code Reader 2维读码器系统(可移动类型)PI+Macro inspection systemPI+Macro检测系统Cell Gap Measure S

36、ystem盒厚测量系统Laser Trimmer激光切线系统Cell Laser Repair液晶盒激光修补系统Oscilloscope示波器Manual probe手动探针系统Precision Parameter AnalyzerTFT参数分析仪R&D研发Product Optical Quality Measurement System产品光学质量检测系统Optical Parameters Measurement System光学特性量测设备Circuit drawing/Orcad电路图编辑器P-spice Analog SimulationP-spice电路仿真器PCB Artwo

37、rkPCB线路图编辑器3D Mechanical Design Tool3D机械设计工具2D structure Design Tool2D结构设计工具Pattern Generator测试图形发生器Resistance Attenuator电阻衰减器illuminance Colorimeter亮度色度计Spectrophotometer亮度色度光谱仪Color Analyzer色彩分析仪R,L,C MeasurementR,L,C测试仪ESD Gun(EMI/EMS)table静电枪台UV TEST chamber紫外线测试箱Seal dispenser边框胶涂布机three axis M

38、easurement Stage三轴量测平台Pre-tilt angle & cell gap measurement system倾斜角盒厚量测仪LC resistivity meter液晶电阻率测量仪Oscilloscope(Analog)模拟示波器Thermo-hygrostat恒温恒湿柜Thermal Shock Chamber冷热冲击舱ESD Gun(EMI/EMS)静电枪Liquid crystal injection machine灌晶机Plasma cleaning machine等离子清洗机Simulation software of LCD Optical paramete

39、rsLCD光学特性模拟软件Layout editor for mask版图设计软件CIM集成控制CIM System-.Manufacturing Execution System(MES)-.Preventive Maintenance System(PMS)-.Statistical Process Control(SPC)-.Equipment Automation Program(EAP)-.Report System-.Engineering Data Analysis(EDA)-.Finished Goods Management System(FGMS)-.Engineering

40、 Data Base(EDB)计算机集成制造系统-.制造执行系统-.机台预防保养系统-.统计制程管制-.设备自动化-.报表系统-.工程数据分析-.产成品管理系统-.工程数据库Operator Interface Client(OIC) 操作者界面FAB Monitoring Client(FMC) 工厂监控系统Dispatcher(DSP)任务分配系统Fault Detection and Classification(FDC)缺陷检查和分类系统Alarm Management System(AMS)机台报警系统Real Time Analysis/Monitoring System(RTAMS)缺陷管理的实时监控/分析系统System Management System(SMS)系统管理系统AMHS物料搬运Unpacking line-.Un packe