ISO 293012023.docx

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1、INTERNATIONA1.STANDARDISO29301editionThid2023-10Microbeamana1.ysisAna1.ytica1.e1.ectronmicroscopyMethodsforca1.ibratingimagemagnicationbyusingreferencemateria1.swithperiodicstructuresAna1.yseparmicrofaisceaux-Microscopiee1.ectroniqueana1.ytiqueMethodesd,eta1.onnagedugrandissementd,imageaumoyendemate

2、hauxderf6rencedestructurespdri&diquesISO2023COPYRIGHTPROTECTEDDOCUMENTISO2023IUirhM*hedbdi1.iUedotherwiseupdhi.o啪InyM1.tta0DmkfifiU81.andonnet8CH-1214Vernier,GenevaPhone：M1.22749O1.11觥ftte:丽丽BQrgPub1.ishedinSwitzer1.andContentsPageForewordivIntroductionv2 Scope13 Normativereferences14 Termsanddefini

3、tions1Imagemagnification54.154.2Definitionoftheimagemagnification5Expressingmagnification6Referencemateria1.s5.15.2Gcncrs1.6RequirementsforCRMZRM7Ca1.ibrationprocedures76.16.2GCne31MountingCRM/RM86.36.56aptug瑶【ionsforca1.ibration8Digitizingtheimagerecordedonphotographicfi1.m10651Genera1.106.6品瑜。SU拙楣

4、和8km湿rf三加岫础df阳如甜gitizedimageW6.6.1 Genera1.126.6.2 Measurementprocedure136三MofSiZeca1.ibrationu6.6.3 Ca1.ibrationOfsca1.eunit(=pixe1.size),S166.96(rat1.onC的飒而a配则归驷.86.9.1 Genera1.186.9.2 Basicsca1.esizecorrespondingtoonepixe1.onthedigitizedimage19Accuracyofimagemagnification20Uncertaintyofmeasuremen

5、tresu1.t21Ca1.ibrationreport239.19.2Genera1.23Contentsofca1.ibrationreport23Annex(informative)Parametersthatinf1.uencetheresu1.tantmagnificationofaTEM2SAnnex B (informative)F1.owchartofimage-magnificationca1.ibrationprocedure26Annex C (informative)Howtodecidethenumberof1.inesforaveraging27Annex D (i

6、nformative)Referencemateria1.sformagnificationca1.ibration29Annex E (informative)Examp1.eoftestreportforca1.ibrationofTKMmagnication33Bib1.iography44ForewordISO(theInternationa1.OrganizationforStandardization)isawor1.dwidefederationofnationa1.standardsttiugh(ISOmrtmiw)bMdniK盟RAucekdHpfff1.QbbGgbodyI

7、committeehasbeenestab1.ishedhastherighttoberepresentedonthatcommittee.Internationa1.organizations,governmenta1.andnon-governmenta1.,in1.iaisonwithISO,a1.sotakepartinthework.ISOco1.1.aboratesc1.ose1.ywiththee1.ectrotechnica1.standardization.Internationa1.E1.ectrotechnica1.Commission(IEC)ona1.1.matter

8、sofTheproceduresusedtodeve1.opthisdocumentandthoseintendedforitsfurthermaintenancearedyiFFHSof1.S0getW1.kes,sK8Gid1.motcgt11w1.gverordance曲htheeditoria1.ru1.esoftheISO/IECDirectives.Part2(seewwsv.iso.org/direc1.ives).N(叼黄区n1.s)a比SH%ntakes1.*2f托舐与设瓢oncfBf在MrIh8N猫HntmafAMS1.vcc1.aimedpatentrightsinres

9、pectthereof.Asofthedateofpub1.icationofthisdocumentISOhadnotreceivednoticeof（八）patent(三)whichmayberequiredtoimp1.ementthisdocument.However,imp1.ementersare懈怖翻琳躺/mj，wWjSOQFg/眸IentS洗蝮油那ion,扁MMSPOn赖岫油嬲9的阳躲Ora1.suchpatentrights.Anytradeusedinthisconstitutenameendorsenent.documentisinformationgivenforthe

10、convenienceofusersanddoesnotForanexp1.anationofthevo1.untarynatureofstandards,themeaningofISOspecifictermsand幽幽蛔豳酒侬遮W即辆0)aSSEif1.毗嘱nwe帼1.丸nBar池帆四dead朝乩CSvbr11isoorgisoforeword.htmI.犯睨Mq加彼JH诚外TeChniCa1.CommitteeISO/TC202,Microbeamana1.ysis,SubcommitteeThisthirdeditioncance1.sandrep1.acesthesecondedit

11、ion(ISO29301:2017),ofwhichitconstitutesaminorrevision.Thechangesareasfo1.1.ows:thee1.ementnameofSi1.verinTab1.eD.1.hasbeencorrectedtoSi1.icon;normativereferencesin4HHe-2havebeenupdated.nyfeedbackorquestionsonthisdocumentShoUkUstandardsbody.Acomp1.ete1.istingofthesebodiescanbefoundatwww.iso.org/membe

12、rs.htm1.IntroductionThetransmissione1.ectronmicroscope(TEM)iswide1.yusedtoinvestigatethemicro/nano-structureg1.ass,r3oedofiditiptf1.nbateria1.s.suchTh(SeJniCbnrtmorsjnvo1.ve9ub(aiano隼antin1.eftimvIrirX1.COnImhn)Uganu1.tra-thinspecimen,interactingwiththespecimenastheypassthrough.Thisinteractionresu1.

13、tsinamagnifiedimagewhichisfocusedontoanimagingdevice,suchasaphotographicfi1.m,animagingR1.g1.ferres81.1.帆ror翩IV犍MiWo螂*feMuse4ab1.xamiMsSi醐1.ant1.yasasing1.eatomicco1.umninagivenspecimen.ThisdocumentaddressestheneedformagnificationCahbrationoftheimages.Itdescribestherequirementsforca1.ibrationoftheim

14、agemagnificationinthepK1.H1.fiPttOrectronmicroscoPeUSingacertifiedreferencemateria1.orareferencemateria1.withISO2023-A1.1.rightsreservedMicrobeamana1.ysisAna1.ytica1.e1.ectronmicroscopyMethodsforca1.ibratingimagemagnificationbyusingreferencemateria1.swithperiodicstructures1 Scopemagni11cationpossess

15、aPeriodictransmissione1.ectronmicroscopegratingreferencesuper-1.atticestructureThisdocumentisapp1.icab1.etothemagnificationbui1.tTEMdigi1.a1.rccordedThisphotographicrefersscanningtransmissione1.ectronmicroscope(STEM),dimensionmeasurementTEM(CD-TEM)andthe2 Normativereferencesconstitutesrequircments1.

16、atestcditiondocumcnt.rcfercncedrefercnccs,(inc1.udingamendments)app1.ies.app1.ies.stabi1.ityISOTermsGeneraZdefinitionsforthecompetenceOfreferencemateria1.producersForthepurposesofthisdocument,thefo1.1.owingtermsanddefinitionsapp1.y.ISOOn1.inebrowsingp1.atform:avai1.ab1.eat4t印swww4f知Fgobp3.1accuracyd

17、ocument,entry:Atestresu1.t1istheca1.ibratedmagnificationobtainedbytheprocedureout1.inedinthisSOURCE:ISO57241:1994I1.3一mcdiRednewNetPq1and2tcentryha，。boonaddedThisdocumentspecifiesaca1.ibrationprocedureapp1.icab1.etoimagesrecordedoverawideca1.ibrationrangeinastructure,suchasaC1.ifTraction(TEM).Therep

18、1.icaramateria1.susedforofsemiconductororanana1.ysingcrysta1.forX-rayana1.ysis,andacrysta1.1.atticeimageofcarbon,go1.dorsi1.icon.animagingp1.ate,ordetectedbyanimagesensorof1.heintoaimagecamera.onadocumenta1.sofi1.mrortotheca1.ibrationofasca1.ebar.Thisdocumentdoesapp1.ythededicatedcritica1.Thefo1.1.o

19、wingdocumentsarereferredtointhetextinsuchawaythatsomeora1.1.oftheircontentundatedreferences,theofthisoftheFordateddocumenton1.ytheanyeditioncitedForISOGuide35rReferencemateria1.sGuidanceforcharacterisationandassessmentofhomogeneityandISO/IEC17025:2017.Genera1.requirementsforthecompetenceoftestingand

20、ca1.ibration1.aboratories317034,andrequirementsISOandIECmaintaintermino1.ogydatabasesforuseinstandardizationatthefo1.1.owingaddresses:IECE1.ectropedia:avai1.ab1.eathttps:/www.e1.ectropedia.org/c1.osenessofagreementbetweenatestresu1.tandtheacceptedreferenceva1.ueNote1Note2toentrr:Thetermacceptedrefer

21、enceva1.ue,isthemagnificationgivenbytheTEMmanufacturer.1)Nowwithdrawn.Rep1.acedbyISO5725-1:2023.ISO2023-A1.1.rightsreservedreferencecntry:withtransparencyimagcthcrma1.Stabi1.itymakccontactimagcnvcnicntzngngctpte(digitizedseriesofoperationstoa1.igntheincidentdirectionofthee1.ectronbeamtotheoptica1.ax

22、is(3.22)usingdef1.ectorsand/ormechanica1.knobsreferencemateria1.,accompaniedbyacertificate,oneormoreofwhosepropertyva1.uesarecertifiedbyaprocedurewhichestab1.ishesitstraceabi1.itytoanaccuraterea1.izationoftheunitinwhichthepropertyva1.uesandforwhicheachcertifiedva1.ueisaccompaniedbyanuncertaintyatcon

23、denceof1toentry:FortheaccuracyrofbeusedfortheCRMoftheimogestructure。),(3.15).formationofadeposited1.ayerofanymateria1.duetotheinteractionofthee1.ectronbeamwiththesamp1.eand/oritsimmediateenvironmentdirectionofcrysta1.whichisrepresentedbycrysta1.index(1.ow1tozoneaxis(3.36)para1.1.e1.,isoftenusefu1.to

24、tothebeamdirectionoptica1.axis(3.22).shadow-castingcarbonrep1.icafi1.mconstitutingagratingwhichcontains500to2000para1.1.e1.groovespermi1.1.imetre,orcross-1.inegratingwithasimi1.ar1.inespacingNote1entry：A)the1.owtorep1.icabeusedasrange.devicethatdetectstheimage(3.13)usingachip-arrayedimagesensor(3.18

25、),suchasacharge-coup1.eddevice(CCD)orcomp1.ementarymeta1.-oxidesemiconductor(CMOS),thatconvertsavisua1.imagetoan3.8rangeOfdetectab1.ee1.ectrondosesi1.1.uminatedonthedetector,inwhichtheimagesigna1.canbedetectedproper1.ye1.ectriccurrentapp1.iedtothecoi1.ofthemagnetic1.ensfocusingconditioninwhichthespe

26、cimenheightcoincideswiththeobjectp1.aneoftheobjective1.ensru1.eronwhichafinesca1.eisdrawnanduti1.izedastherefwwcesca1.etomeasurethedistanceinthedigitizedimageafterdigitizingitwithanimagescanner(3.17)Note1toImageThetransmittedandscannerandtoOfthetheg1.asssca1.earethetothe3.16).ISO2023-A1.1.rightsrese

27、rvedOmUncertaiotyofMrGivenmagnificationindicatedonTEMdisp1.ayDeBasicpitchdistance(pix)indigitizedimageofmagnifiedreferencestructureDt(=Dccos0)Ang1.e-correctedpitchdistance(pix)indigitizedimageofmagnifiedreferencestructure(JStandarddeviationca1.cu1.atedfromaseriesofva1.uesDTSHEETfor,%,vandS(Thistab1.

28、eisneededon1.yforphotographicfi1.morimagingp1.ateuse)Frequencyofrepetitionsofindependentmeasurement:n-3tmeNameofg1.asssca1.e:g=Acce1.eratingvo1.tage:kVTi1.tang1.e,fKpfwppnfhvicCffhPf*Hicn1.nvOrderofrepetitions(degree)Averagedaa2Imagereso1.utionofscannerOrderofrepetitionMeasurementAveragedNPositionI粉

29、Expandeduncertainty：U=-%=卜隔,加强小Ca1.ibratedsca1.ebarfor1m:1.U(M)=M1.31.u(m)三(mm)Ca1.ibratedsca1.ebarfor1nm:/-u(11m)=f1.61.u(nm)=(mm)MgGivenmagnificationindicatedonTEMdisp1.ayDt(AV)Overa1.1.averagedva1.ueofthepitchdistance(pix)indigitizedimageofmagnifiedreferencestructure1.aActua1.1.engthOfrcfcrencest

30、ructureon(C)RMcorrespondingto(DtS)5(av)Overa1.1.averagedva1.ueofpixe1.sizeUCCombinedstandarduncertaintyofca1.ibratedmagnificationf8Standarddeviationca1.cu1.atedfromaseriesofaveragedDeva1.ueseStandarddeviationca1.cu1.atedfromaseriesof1.va1.uesNStandarddeviationca1.cu1.atedfromaseriesofaveragedNva1.ue

31、sOaStandarddeviationca1.1.atedfromaseriesofava1.uesrmUncertaintyof(C)RMgjUncertaintyofreferenceg1.asssca1.enFrequencyofrepetitionsforindependentmeasurementofpitchdistanceof(C)RMkFrequencyofrepetitionsforindependentmeasurementofpixe1.sizeatimagedigitizationCoveragefactor;theconfidenceinterva1.isabout

32、95%or99%,thefactorkcanbesetto2or3respective1.y.1.u(11)1.engthofca1.ibratedsca1.ebarcorrespondingto1m/,“(nm)1.engthofca1.ibratedsca1.ebarcorrespondingto1nmCa1.ibrationResu1.tsMagnificationtobeca1.ibrated：MR=-34SM=A=U=22m)1.u(m)=(mm)MKSDt(AV)1.o(tao(7rmm1.u(nm)ISO2023-A1.1.rightsreserved43(Fordigita1.

33、camerause)Pixe1.size:S=(mm)Qibniedrupii而a堆例即XMM0姝Expandeduncertainty:仍+f1.S2Ca1.ibratedsca1.ebarfor1m:1.u(m)=1.3Ca1.ibratedsca1.ebarfor1nm：1.u(nm)=M/1.Oe1.u(nm)=(mm)GivenmagnificationindicatedonTEMdisp1.ayPixe1.sizeofimagesensorguaranteedbymanufacturerOvera1.1.averagedva1.ueofthepitchdistance(pix)in

34、digitizedimageofmagnifiedreferencestructureActua1.1.engthofreferenceStnictureon(C)RMcorrespondingto(DxS)S(Av)Overa1.1.averagedva1.ueofP汉e1.sizeUcCombinedstandarduncertain1.yofca1.ibratedmagnificationStandarddeviationca1.cu1.atedfromaseriesofaveraged卜va1.uesStandarddeviationca1.cu1.atedfromaseriesofv

35、a1.uesUncertaintyof(C)RMOISUncertaintyofpixe1.sizeofimagesensorFrequencyofrepetitionsforindependentmeasurementofpitchdistanceof(C)RMCoveragefactor;theconfidenceinterva1.isabout95%or99%fthefactorkcanbesetto2or3,respective1.y.1.u(m)Ixngthofca1.ibratedsca1.ebarcorrespondingto1m1.engthofca1.ibratedsca1.

36、ebarcorrespondingto1nm(H23Bib1.iography轻6零的ZwqR监8般龈驶Sandprecision)ofmeasurementmethodsandresu1.tsPart1:)1.Microbeamana1.ysisScanninge1.ectronmicroscopyGuide1.inesforca1.ibratingimageISOGuide30,Referencemateria1.sSe1.ectedtermsanddefinitions诩哪WSfHf班3任扁怫产Ofmeasurement-Part3:Guidetvtheexpressionofuncer

37、tainty(5 SpenceJ.C.H.1.Experimenta1.high-reso1.utione1.ectronmicroscopy,2ndedition,OxfordUniversityPress,1988(6 Wi1.1.iamsD.B.,CarterC.B.TransmissionE1.ectronMicroscopy,ATextbookforMateria1.sSciencez2ndedition,Springer,NewYork,2009IStH1.(k11,(ticVU11iOHfOii3SCi,S.fVCi3yt*(1.fXVid1.iikSRemarkS/Comments: